Method of preparing zinc oxide/titanium dioxide composite self-assembly thin film gas sensitive device

A technology of titanium dioxide and gas sensor, which is applied in its related fields, can solve the problems of reducing component sensitivity and life, low sensitivity, high operating temperature, etc.

Inactive Publication Date: 2008-09-03
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Zinc oxide (ZnO) is the earliest semiconductor gas-sensing material, which is a surface-controlled gas-sensing material. Its physical and chemical properties are stable, and it can be used as a gas-sensing sensor material to detect a variety of gases, but it also has high operating temperature, Due to the shortcomings of long response time and low sensitivity, in order to improve the gas sensing performance of ZnO, some precious metals are often added as catalysts.
Precious metals such as silver (Ag), platinum (Pt), palladium (Pd) can significan

Method used

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  • Method of preparing zinc oxide/titanium dioxide composite self-assembly thin film gas sensitive device
  • Method of preparing zinc oxide/titanium dioxide composite self-assembly thin film gas sensitive device
  • Method of preparing zinc oxide/titanium dioxide composite self-assembly thin film gas sensitive device

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Embodiment 1

[0035] A kind of ZnO / TiO of the present invention 2 A method for preparing a composite self-assembled thin film gas sensor, the preparation steps of which are as follows:

[0036] 1. Dissolve 0.5g zinc acetate in 150ml H 2 After mixing well in O, add 4ml H while stirring2 o 2 , reacted for 6h under light to obtain uniform and stable ZnO 2 Sol. Add dilute HCl to adjust its pH to 5.

[0037] 2. Dissolve 4g of tetrabutyl titanate in 20ml of ethanol, then add 3 drops of concentrated hydrochloric acid dropwise, stir and mix evenly, then slowly add 100ml of deionized water with 3 drops of concentrated hydrochloric acid into the above solution, and stir for 30 minutes , and reacted in a water bath at 40°C for 60 minutes to obtain light yellow transparent TiO 2 Sol.

[0038] 3. Prepare polyallylamine hydrochloride and polystyrene sodium sulfonate aqueous solutions with a concentration of 0.1 mg / ml as polyelectrolyte cations and polyelectrolyte anions, respectively.

[0039] 4. ...

Embodiment 2

[0045] A kind of ZnO / TiO of the present invention 2 A method for preparing a composite self-assembled thin film gas sensor, the preparation steps of which are as follows:

[0046] 1. Dissolve 1g zinc nitrate in 100ml H 2 After mixing well in O, add 2ml H while stirring 2 o 2 , reacted for 2 hours under light, then added 2ml of H 2 o 2 , after another 3h of reaction, a uniform and stable ZnO 2 Sol. Add acetic acid to adjust its pH to 4.

[0047] 2. Dissolve 10g of tetrabutyl titanate in 60ml of ethanol, then add 10 drops of concentrated hydrochloric acid dropwise, stir and mix evenly, then slowly add 300ml of deionized water with 10 drops of concentrated hydrochloric acid into the above solution, and stir for 30 minutes , and reacted in a water bath at 50°C for 120min to obtain light yellow transparent TiO 2 Sol.

[0048] 3. Prepare polydiallyldimethylammonium chloride and polyacrylic acid aqueous solutions with a concentration of 0.3 mg / ml as polyelectrolyte cations a...

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Abstract

The invention provides a method for preparing zinc oxide/titanic oxide composite self-assembled thin film air-sensitive device, which includes the following steps: first performing a special treatment of the substrate, and then the substrate has electric charges, then dipping the substrate into a ZnO2 sol with positive electrical charges, TiO2 sol with positive electrical charges and polyelectrolyte solution with negative charges in [(ZnO/PSS)/(TiO2/PSS)]n sequence respectively, cleaning the substrate with deionized water after the substrate is fetched from the solution or sol every time, drying the substrate with argon gas or nitrogen. Under the action of the electrostatic gravitational force, the ZnO2 sol grain, the TiO2 sol grain and the polyelectrolyte are adsorbed on the surface of the substrate layer by layer, the process is repeated seriously, the ZnO2/TiO2 composite self-assembled air-sensitive thin films with various thicknesses are made. Then, a ZnO/TiO2 composite self-assembled grain air-sensitive thin film is obtained by heat treating. The method has simple technique, the substrate shape has no special requirements, and the thickness of the film is controlled in the molecule level, the film-forming has good repeatability. The obtained ZnO/TiO2 composite self-assembled grain air-sensitive thin film can be used for the preparation of the gas-sensitive sensor device.

Description

(1) Technical field [0001] The invention provides a zinc oxide / titanium dioxide (ZnO / TiO 2 ) A method for preparing a composite self-assembled thin film gas sensor, which relates to a method for preparing a metal oxide semiconductor thin film gas sensor by using layer-by-layer electrostatic self-assembly, especially involving the preparation of ZnO / TiO by layer-by-layer electrostatic self-assembly 2 The invention relates to a method for a composite film gas sensor, belonging to the technical field of material science. (2) Background technology [0002] Although due to surface effects and other reasons, the gas sensor with single-layer thin film structure has obvious advantages in performance compared with sintered and thick film gas sensors. But there are still some weaknesses, especially the poor selectivity to some gases, and although the material stability has been improved, it is still not ideal. For the multi-layer thin film structure, each layer of thin film will dif...

Claims

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Application Information

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IPC IPC(8): G01N27/409
Inventor 孙猛郝维昌张俊英王天民
Owner BEIHANG UNIV
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