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Composite ferro-electric thin film for microwave adjustable device and method for making same

A ferroelectric thin film and composite technology, applied in waveguide devices, chemical instruments and methods, circuits, etc., to achieve the effects of simple equipment, low dielectric loss, and uniform film forming area

Inactive Publication Date: 2008-11-19
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, so far, there are few reports on the preparation of composite ferroelectric thin films of microwave dielectric materials and barium strontium titanate by sol-gel method.

Method used

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  • Composite ferro-electric thin film for microwave adjustable device and method for making same
  • Composite ferro-electric thin film for microwave adjustable device and method for making same
  • Composite ferro-electric thin film for microwave adjustable device and method for making same

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Experimental program
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Effect test

Embodiment 1～2

[0022] Embodiment 1~2: in Pt(111) / Ti / SiO 2 / Si(100) substrates grow 30% Mg by mole percent respectively 2 TiO 4 and 70% Ba (1-x) Sr x Ti 0.85 Mg 0.15 o 3 (x=0.40) composite ferroelectric thin film and 40% Mg by mole percent 2 TiO 4 and 60% Ba (1-x) Sr x Ti 0.85 Mg 0.15 o 3 (x=0.40) composite ferroelectric thin film:

Embodiment 1

[0023] Example 1: 70% Ba (1-x) Sr x Ti 0.85 Mg 0.15 o 3 , x=0.40 30% Mg 2 TiO 4

Embodiment 2

[0024] Example 2: 60% Ba (1-x) Sr x Ti 0.85 Mg 0.15 o 3 , x=0.40 40% Mg 2 TiO 4

[0025] A. The chemical raw materials used are barium acetate, strontium acetate, magnesium nitrate and tetra-n-butyl titanate, the solvent is glacial acetic acid, ethylene glycol ether and water, acetylacetone is the chelating agent, according to Ba 0.60 Sr 0.40 Ti 0.85 Mg 0.15 o 3 The chemical ratio, first weigh 2.2988g barium acetate, 1.2883g strontium acetate, 0.5769g magnesium nitrate, heat to boiling in 10mL glacial acetic acid solution and 5mL water, when cooled to room temperature, then add the molar ratio of 1:2 A mixed solution of 4.4282g of tetra-n-butyl titanate and 2.5531g of acetylacetone to form Ba 0.60 Sr 0.40 Ti 0.85 Mg 0.15 o 3 The solution.

[0026] B. According to Mg 2 TiO 4 According to the chemical ratio, take 5.1282g of magnesium nitrate and dissolve it in 10mL of ethylene glycol ether, add 5mL of deionized water, stir until completely dissolved, then add t...

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Abstract

The invention discloses a composite ferroelectric film for a microwave adjustable device, which is characterized in that: the composite ferroelectric film by mol percentage consists of 30 to 40 percent of Mg2TiO4 and 70 to 60 percent of Ba1-xSrxTi0.85Mg0.15O3 (the x is equal to between 0.40 and 0.60). The composite ferroelectric film has good electrical property, dielectric tenability and low dielectric loss, and can be used as microwave material.

Description

technical field [0001] The invention relates to a novel ferroelectric thin film for microwave adjustable devices and a preparation method thereof. Background technique [0002] Ferroelectric thin films have excellent properties such as ferroelectricity, high dielectricity, piezoelectricity, pyroelectricity, electro-optic effect, acousto-optic effect, thermo-optic effect, photorefractive effect, nonlinear optical effect, etc., so they can be used One of these properties can also be used to make functional devices by comprehensively utilizing two or more properties through cross-coupling, and can also be combined with the functional effects of other materials to make functional devices. In particular, the low voltage required for ferroelectric thin films to be used in microwave tunable devices (such as microwave phase shifters for phased array radars) and the low cost of fabrication make the research on thin films a current hotspot. The research on ferroelectric thin films ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/32C30B29/22H01P1/18
Inventor 翟继卫高丽娜
Owner TONGJI UNIV