Soft magnetic film inductor and magnetic multi-component alloy thin film

A soft magnetic thin film, multi-component alloy technology, applied in the direction of inductors, inductors/transformers/magnets, fixed inductors, etc., can solve the problem of low resistance value, achieve the effect of low coercive field, save time, and simple process

Inactive Publication Date: 2008-12-10
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such a layered structure design can effectively increase the saturation magnetization, but the overall resistance value is also low. When operating at high frequency (GHz), the loss of eddy current will make its quality factor drop rapidly and cannot be suitable for high frequency Use under

Method used

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  • Soft magnetic film inductor and magnetic multi-component alloy thin film
  • Soft magnetic film inductor and magnetic multi-component alloy thin film
  • Soft magnetic film inductor and magnetic multi-component alloy thin film

Examples

Experimental program
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Effect test

experiment example 1

[0075] Experimental Example 1 (Soft Magnetic Thin Film Inductor with FeCoNiAlB Magnetic Film)

[0076] Five alloying elements Fe, Co, Ni, Al, B are selected and smelted into alloy targets. The composition ratio of the alloy target is Fe 42 co 37 Ni 10 al 5 B 6 , the saturation magnetic flux density of the alloy target is 1.66T, and the coercive field is 18Oe.

[0077] Using the manufacturing method of the soft magnetic thin film inductor mentioned above, the FeCoNiAlB thin film is used to manufacture the ferromagnetic thin film inductor. The process conditions of FeCoNiAlB film are: working pressure is 5mtorr, gas flow rate is 18sccm, background pressure is less than 9*10 -6 torr, the working distance is fixed at 5cm, the substrate is silicon oxide (200nm) / n-type Si(100), the coating time is 30min, and the coating power is 53W, and radio frequency magnetron sputtering coating is performed. Then, in order to induce the magnetic anisotropy of the magnetic film, field an...

experiment example 2

[0080] Select six alloying elements Fe, Co, Ni, Al, Cr, Si, and melt them into alloy targets. The composition ratio of alloy targets is Fe 40 co 35 Ni 5 al 5 Cr 5 Si 10 , the saturation magnetic flux density of the alloy target is 1.18T, and the coercive field is 8Oe.

[0081] Then, the FeCoNiAlCrSi ferromagnetic thin film inductor was fabricated, except that the FeCoNiAlCrSi thin film was used as the magnetic multi-element alloy thin film, and the annealing temperature was 200° C., the manufacturing process was the same as that of Experimental Example 1. At this time, the saturation magnetization of the FeCoNiAlCrSi film is 900emu / cm 3 , the coercive field of the hard axis is 2Oe, the anisotropic field strength is about 20Oe, and the film resistivity is 350μΩ-cm. Figure 6 and Figure 7 It is the inductance value and Q value measured by the network analyzer. Such as Figure 6 and Figure 7 As shown, at 800MHz, the FeCoNiAlCrSi ferromagnetic film inductor has a 14% i...

experiment example 3

[0083] Select three alloying elements Fe, Co, B, and smelt them into an alloy target. The composition ratio of the alloy target is (Fe 0.55 co 0.45 ) 90 B 10 .

[0084] Then, using the same production process as in Experimental Example 1, (Fe 0.55 co 0.45 ) 90 B 10 thin films, and tested for various magnetic values. The data of each magnetic value are listed in Table 1.

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Abstract

A magnetic complex alloy film is suitable for high frequency operation. This magnetic complex alloy film is used for improving the quality factors of the film inductance under high frequency operation and improving the inductance value. This magnetic complex alloy film achieves that the magnetic complex alloy film still has good soft magnetic property when under high frequency operation mainly through leading the materials design concept of complex high-entropy alloy and utilizing some material properties of the complex high-entropy alloy, such as high randomness, nano microcrystalline structure, low coercive field and high resistivity.

Description

technical field [0001] The invention relates to a passive element, and in particular to a soft magnetic film inductor and a magnetic multi-element alloy film. Background technique [0002] With the rapid development of the information technology (Information technology, IT) industry, there is an opportunity for the soft magnetic film to be applied in the RF frequency band, especially in the range of 800 MHz to 6 GHz, and its application range is wide. For example, soft magnetic thin films can be applied to integrated passive components, electromagnetic noise prevention countermeasures, and sensors. In particular, in terms of wireless communication applications, the operating frequency of WLAN (wireless local area network) systems has reached the GHz band to cope with the transmission of large amounts of data, such as Bluetooth in the 2.45-GHz band and IEEE802.11b and 5.8 GHz band IEEE802.11a. [0003] On the other hand, in order to improve the portability of mobile communi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F17/00H01F10/12H01F41/00
Inventor 叶均蔚张文成杨智超郑乃文
Owner IND TECH RES INST
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