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Ferro-voltage ceramic component with low sintering temperature character, production and uses thereof

A low sintering temperature, piezoelectric ceramic technology, applied in the field of material science, can solve the problems of small chemical uniformity and grain size, reduce the chemical ratio of PZT, deterioration of driver performance, etc., to reduce industrial energy consumption and cost, reduce The effect of volatilization and improving product quality

Inactive Publication Date: 2009-05-13
TONGJI UNIV
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Problems solved by technology

At present, in the manufacturing process of high-temperature co-fired (HTCC, sintering temperature higher than 1200°C) multilayer structure piezoelectric drive devices, due to the high sintering temperature, the interaction between the internal electrode material Pd or Ag-Pd and PZT ceramics leads to relatively low Small chemical uniformity and grain size, which reduces the stoichiometry of PZT, leading to poor driver performance (Ref. 5)
The use of hard ferroelectric piezoelectric ceramics with low sintering temperature is an effective way for LTCC to make multilayer piezoelectric drive devices (references 6, 7); but it is also a difficult point in the development of current commercial technologies, and there are few related research reports (reference Literature 2, 4)

Method used

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  • Ferro-voltage ceramic component with low sintering temperature character, production and uses thereof
  • Ferro-voltage ceramic component with low sintering temperature character, production and uses thereof
  • Ferro-voltage ceramic component with low sintering temperature character, production and uses thereof

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Embodiment Construction

[0045] The present invention will be further described below in conjunction with the embodiments shown in the accompanying drawings.

[0046] 1. (1-x)Pb(Zr 0.52 Ti 0.48 )O 3 -xBi(Zn 1 / 2 Ti 1 / 2 )O 3 Preparation of Ferroelectric Piezoelectric Ceramics: Bi 2 o 3 , PbO, ZnO, ZrO 2 and TiO 2 Weigh the oxide powder according to the stoichiometric ratio, add absolute ethanol and grind it in an agate mortar for 2 hours, pre-fire at 800°C for 5 hours; add absolute ethanol and grind it in an agate mortar for 2 hours, and then granulate; uniaxial stress molding, forming The pressure is 250MPa, and the diameter of the green body is 10mm; the green sheet is sintered at 900°C-1100°C for 40 minutes-10 hours. Sintered ceramic sheet shrinkage see figure 1 , For x=0.10-0.25 samples, the sintering shrinkage at 950°C is greater than 10%. X-ray diffraction measurement x=0.10-0.20 The sample is a single-phase perovskite structure, the test results are shown in figure 2 with image 3 ....

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Abstract

The invention relates to a ferroelectric piezoelectric ceramic with the characteristic of low sintering temperature. The compositions are (1-x-y)PbZrO3-xPbTiO3-yBi(Zn1 / 2Ti1 / 2)O3 and z weight percent of MnO2, wherein x is equal to between 0.30 and 0.50, y is equal to between 0.05 and 0.25, and z is equal to between 0.0 and 0.5. Oxide materials and the prior solid-state reaction electronic ceramic process are adopted to achieve the aim of sintering a compact piezoelectric ceramic chip at a low temperature between 900 and 1,000 DEG C. The PbZrO3-PbTiO3-Bi(Zn1 / 2Ti1 / 2)O3 ferroelectric piezoelectric ceramic is a single phase perovskite structure and has a 'hard' piezoelectric property. Presintering powder of the PbZrO3-PbTiO3-Bi(Zn1 / 2Ti1 / 2)O3 ferroelectric ceramic powder as a sintering auxiliary, and an electronic ceramic process of solid phase reaction are adopted so as to achieve the low temperature sintering of the strontium-doped lead zirconate titanate at a temperature of 1,050 DEG C as well as the modification of the piezoelectric property. The ferroelectric piezoelectric ceramic is particularly applicable to the manufactures of functional devices such as emission piezoelectric ceramic devices, low-temperature cofiring multi-layer ceramic piezoelectric drives, transformers, and transducers.

Description

technical field [0001] The invention belongs to the field of material science and relates to a PZT piezoelectric ceramic material and device preparation technology. Background technique [0002] PZT piezoelectric ceramic is an important functional material and intelligent material, which is widely used in electronic components, micro-displacement control, micro-ultrasonic motor and other fields. Due to the characteristics of high Curie temperature, strong piezoelectricity, easy doping modification, and good stability, PZT ceramics still occupy a dominant position in the field of piezoelectric ceramic materials and devices. PZT ceramic drivers, including monolithic and multilayer drivers, have been widely used in micro-displacement control and ultrasonic motor systems. [0003] The densification and sintering technology of PZT ceramic powder has a great influence on the quality of PZT products. Traditional pressureless sintering of PZT piezoelectric ceramics is usually carr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/48C04B35/472C04B35/49C04B35/622C04B35/64H01L41/187H10N30/853
Inventor 于剑汪婷婷安菲菲
Owner TONGJI UNIV
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