A method of making a smooth surface microstructure
A manufacturing method and technology of curved surface structure, applied in the field of MEMS, can solve the problems of limited application range, positive photoresist materials are easily eroded by acid and alkali or organic reagents, and limit the height of microstructures, which achieves a simple process and is conducive to expansion. applied effect
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Embodiment 1
[0016] The substantive features and remarkable progress of the present invention will be further described below in conjunction with the accompanying drawings using SU-8 photoresist.
[0017] 1. Take the cleaned silicon wafer and bake it at 150°C for 20 minutes. After cooling to room temperature, spin-coat the first layer of SU-8 photoresist and place it on a hot plate for 1 minute at 65°C. Bake for 15 minutes, then cool to room temperature, as figure 1 shown.
[0018] 2. Expose the coated and soft-baked substrate through a photomask. At this time, the PAG in the exposed area of the first layer of SU-8 photoresist will be decomposed to generate photoacid, such as figure 2 shown.
[0019] 3. Spin-coat the second layer of SU-8 photoresist directly on the surface of the first layer of SU-8 photoresist after exposure within 1 hour, such as image 3 shown.
[0020] 4. Place the silicon substrate spin-coated with the second layer of photoresist on a hot plate and bake at 95...
Embodiment 2
[0023] Utilize the process method of making the SU-8 curved surface microstructure that embodiment 1 proposes to make microlens arrays with different curvatures (such as Figure 6 As shown), the curvature of the microlens can be controlled by adjusting the thickness of the bottom layer (first layer) SU-8 photoresist and the size and shape design of the light-transmitting structure of the photolithography mask. The thickness of the bottom layer SU-8 photoresist is between Between 10 μm-1000 μm, the shape of the light-transmitting structure of the photolithographic mask can be a regular polygon or a circle, and the side length of the regular polygon or the diameter of the circle is 10 μm-1000 μm. The fabricated microlens array can be applied to fields such as flat panel display, three-dimensional stereoscopic imaging, fiber optic coupler, micro-focusing, and micro-projection.
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