Method for preparing novel conductive ceramic evaporation boat by combustion synthesis

A conductive ceramic and combustion synthesis technology, which is applied in the field of preparing new conductive ceramic evaporation boats, can solve the problems of poor uniformity, long production cycle, and high cost of bulk conductive ceramic evaporation boats, and achieve excellent performance, short production cycle, and low cost. Effect

Active Publication Date: 2010-06-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problems of high energy consumption, high cost, long production cycle, and poor uniformity of the material of the large conductive ceramic evaporating boat in the preparation method of the existing new-type conductive ceramic evaporating boat. Method for Synthesizing and Preparing Novel Conductive Ceramic Evaporation Boat

Method used

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Experimental program
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Effect test

specific Embodiment approach 1

[0021] Specific Embodiment 1: In this embodiment, a method for preparing a conductive ceramic evaporation boat by combustion synthesis is realized through the following steps: 1. After drying the raw material A, put it into a ball mill jar for ball milling for 12 to 24 hours, and control the ball milling rate to 100 ~300 revs / min, the ball material mass ratio is 3: 1, obtains mixed powder, and wherein raw material A is made up of the aluminum powder of 20~80 parts and the titanium diboride of 30~80 parts by weight; Two, will Put the mixed powder into a rubber bag or a latex bag, and use cold isostatic pressing under a pressure of 8-30 MPa to form a prefabricated body. Control the porosity of the prefabricated body to 30-50%, and then put the prefabricated body into a In a closed pressure vessel with circulating cooling water, then fill high-pressure nitrogen gas so that the pressure on the prefabricated body in the closed container is 20-500MPa, and then ignite to make the pref...

specific Embodiment approach 2

[0024] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that in step 1, the raw material A is put into the dried raw material B before being put into a ball mill jar for ball milling. 1×10 2 Under the vacuum condition of Pa, dry for 10-20h; Wherein, the raw material B consists of 5-60 parts of boron carbide and 5-40 parts of silicon powder, or 5-60 parts of boron carbide and 5-40 parts by weight. Composed of 40 parts of titanium powder. Other steps and parameters are the same as those in Embodiment 1.

[0025] This embodiment adopts the combustion synthesis-hot isostatic pressing method to synthesize conductive ceramic composite materials, which has the advantages of low energy consumption, low cost, short production cycle, and high production efficiency; it can also prepare large conductive ceramic composite materials with good uniformity , a large piece of conductive ceramic material with a diameter of 200mm and a length of 1000mm,...

specific Embodiment approach 3

[0027]Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that in step one, before ball milling, add 0.1 to 30 parts of diluent to the ball mill jar, the diluent is a ceramic diluent and / or or metallic thinners.

[0028] After the diluent is added in this embodiment, the reaction temperature is lowered, the controllability of the reaction process is improved, and the conductive ceramic evaporation boat obtained has good conductivity and corrosion resistance.

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Abstract

The invention discloses a method for preparing a conductive ceramic evaporation boat by combustion synthesis, which relates to a method for preparing the conductive ceramic evaporation boat. The method solves the problems that the method for preparing a conductive ceramic material of a conventional conductive ceramic evaporation boat has large energy consumption, high cost and long production period and a massive material of the conductive ceramic evaporation boat has poor uniformity. The method comprises the steps of: 1, weighing raw materials; 2, performing ball-mill mixing on the raw materials; 3, performing pressure forming to obtain a preformed blank, and then igniting to make preformed blank perform a self-propagating combustion reaction to obtain a conductive ceramic composite material; and 4, cutting and processing the conductive ceramic composite material to obtain the conductive ceramic evaporation boat. The method has the advantages of low energy consumption, low cost and short production period, finishes the reaction within a few minutes, adopts a hot isostatic pressing method to pressurize the material, obtains the composite material with good uniformity, and further obtains the evaporation boat with good uniformity. The method can manufacture the large-size material of the conductive ceramic evaporation boat with the diameter of between 40 and 200mm and the length of between 50 and 1,000mm.

Description

technical field [0001] The invention relates to a method for preparing a novel conductive ceramic evaporation boat. Background technique [0002] The conductive evaporation boat is a key consumable material in the vacuum coating industry. The service life of imported evaporator boats is about 12 hours. As a one-time consumable product, the annual demand for evaporator boats is millions, which has a broad market prospect. In the metal evaporation industry, the first-generation evaporation boat material is graphite, but it is easily corroded by liquid aluminum and has a very short life. Later, after the graphite surface was coated with protective coatings such as TiC, HfC, TaC, etc., the life of the graphite boat was only a few hours. At present, BN-TiB is mainly used in industry 2 The second-generation evaporation boat material, combining the corrosion resistance of BN to aluminum liquid and TiB 2 Excellent electrical conductivity, with good performance. However, in extr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/622C04B35/64C04B35/582C04B35/5835
Inventor 郑永挺赫晓东
Owner HARBIN INST OF TECH
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