Preparation method of radio frequency glow discharge inductively coupled plasmas of nano powder material

A radio frequency glow discharge and radio frequency plasma technology, applied in the preparation of oxide/hydroxide, etc., can solve the problems of coarse powder particle size, chemical group contamination on the powder surface, and uneven distribution.

Active Publication Date: 2010-06-16
GUANGDONG XINGFA ALUMINUM
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention provides a radio-frequency glow discharge inductively coupled plasma preparation technology for synthesizing nano-powder materials, which can be used to prepare nano-SiO Various oxide powders and pure metal powder materials such as 2, nm

Method used

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  • Preparation method of radio frequency glow discharge inductively coupled plasmas of nano powder material
  • Preparation method of radio frequency glow discharge inductively coupled plasmas of nano powder material
  • Preparation method of radio frequency glow discharge inductively coupled plasmas of nano powder material

Examples

Experimental program
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Effect test

Embodiment 1

[0038] Step 1: Connect the oxygen, that is, the edge oxygen for cooling, and the ignition gas argon, the pressure of oxygen is 0.3-0.4MPa, and the pressure of argon is 0.2MPa. Turn on the exhaust fan, and the exhaust pressure is 500-1500Pa. Connect the circulating water to start cooling the electronic tube, radio frequency power supply and induction coil (antenna) 1, please refer to figure 2 , water pressure 0.2 ~ 0.5MPa. Turn on the power supply of the reaction raw material heater (evaporator), start heating the liquid-phase reaction raw material to vaporized gaseous state, or the powder raw material conveying device is ready. Turn on the power supply of the electronic tube to preheat for 20 to 40 minutes.

[0039] Step 2: Connect the high voltage power supply, adjust the spark generator 2, see figure 2 , generate electric sparks, and ionize the small quartz tube 5 (attached figure 2 ) in the argon, forming an argon plasma flame.

[0040] Step 3: Slowly reduce the flo...

Embodiment 2

[0045] Example 2 - Preparation of nm-SiO 2 Key process parameters of powder materials:

[0046] Preparation of non-metallic oxide nm-SiO by RF glow discharge inductively coupled plasma technique 2 powder material

[0047] RF plasma device FD-934S, side-heated electron tube, forced cooling by circulating water.

[0048] The inner diameter of the large quartz tube is 70mm, the inner diameter of the small quartz tube is 50mm, the wall thickness is 3.5mm, the diameter of the glow discharge coil (antenna) is 120mm, and the diameter of the copper core (hollow, cooled by water) is 12mm. The diameter of the first-stage diffuser in the two-stage diffuser is 80 mm, the taper is 45 degrees, and the inner diameter of the second-stage diffuser is 250 mm.

[0049] The operating conditions of the preparation device are as follows:

[0050] 1. Ignition gas, the volume flow rate of argon gas is 3m 3 / h;

[0051] 2. Working gas, oxygen volume flow rate is 8m 3 / h;

[0052] 3. Boundary c...

Embodiment 3

[0058] Example 3 - Preparation of nm-TiO 2 Key process parameters of powder materials:

[0059] Preparation of Metal Oxide nm-TiO by Radio Frequency Glow Discharge Inductively Coupled Plasma Technology 2 powder material

[0060] RF plasma device FD-934S, side-heated electron tube, forced cooling by circulating water.

[0061] The inner diameter of the large quartz tube is 70mm, the inner diameter of the small quartz tube is 50mm, the wall thickness is 3.5mm, the diameter of the glow discharge coil (antenna) is 120mm, and the diameter of the copper core (hollow, cooled by water) is 12mm. The diameter of the first-stage diffuser in the two-stage diffuser is 80 mm, the taper is 45 degrees, and the inner diameter of the second-stage diffuser is 250 mm.

[0062] The operating conditions of the preparation device are as follows:

[0063] 1. Ignition gas, the volume flow rate of argon gas is 4m 3 / h;

[0064] 2. Working gas, oxygen volume flow rate is 10m 3 / h;

[0065] 3. Bo...

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Abstract

The invention relates to a preparation method of radio frequency glow discharge inductively coupled plasmas of a nano powder material, which comprises the following steps of: firstly, exciting and maintaining high-density radio frequency plasmas with large calibers; secondly, carrying out plasma high temperature chemical reactions to form plasma primary reactants; thirdly, condensing the plasma primary reactants into the nano powder material with high purity by adopting a two-level diffusion tube gradient shock-cooling way; and finally, collecting the nano powder material, and neutralizing the reaction tail gas. The invention achieves the continuous industrial preparation of the radio frequency plasma glow discharge nano powder material, the particle sizes and the distributions of the powder material are easy to control, the particle sizes are in normal distribution in the range of 10-50nm, the powder material is mainly in round shape and has no contamination of functional groups on the surfaces, and the purity is above 9.5%. The invention has the advantages of environment-friendliness of production process, wide application areas of products, and obvious technology values and social and economic benefits.

Description

technical field [0001] The present invention relates to nanometer material science and technology, in particular to the synthesis and preparation technology of nanometer powder materials, especially a technology for preparing nanoscale powder materials such as metal or nonmetal oxides and metals by using radio frequency glow discharge inductively coupled plasma. Background technique [0002] Nano-science and technology (Nano-ST) has risen rapidly since the 1990s. Nano-science and technology is a technical problem in the study of the motion laws and interactions of systems composed of substances with sizes between 0.1 and 100 nm and possible practical applications. Nanomaterials science and technology is the foundation of nanoscience and technology. [0003] With its unique mechanical, physical, chemical, thermal and other properties, nanomaterials have shown a great space for research and practical application. Nanopowder materials have a large specific surface area and uniq...

Claims

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Application Information

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IPC IPC(8): B22F9/00B22F9/14B22F9/16C01B13/14
Inventor 吴锡坤梁奕清
Owner GUANGDONG XINGFA ALUMINUM
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