Integrated grating micro-cantilever biochemical sensor and chip manufacturing method

A biochemical sensor and micro-cantilever technology, applied in the field of micro-electromechanical systems and sensing, to achieve the effect of being suitable for mass production, high sensitivity and high sensitivity

Inactive Publication Date: 2010-06-23
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the above electrical detection methods are convenient for direct integration with circuits and large-scale arraying, their detection sensitivity is not as high

Method used

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  • Integrated grating micro-cantilever biochemical sensor and chip manufacturing method
  • Integrated grating micro-cantilever biochemical sensor and chip manufacturing method
  • Integrated grating micro-cantilever biochemical sensor and chip manufacturing method

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Experimental program
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Effect test

Embodiment 1

[0061] Sensor Structure Reference figure 2 , making the integrated grating micro-cantilever biochemical sensor of the present invention, its specific preparation steps are as follows:

[0062] 1). First clean the glass substrate, deposit gold on it by sputtering or evaporating a metal film, the thickness of which is: 0.1-0.5 microns; photoetch or corrode gold to form metal (gold) Grating, the metal grating has a width of 5 microns and a pitch of 5 microns;

[0063] 2) the glass substrate obtained in step 1) is coated with photoresist as a sacrificial layer, and the thickness of the photoresist is 6 microns, and photoetching forms the anchor pattern of the micro-cantilever beam;

[0064] 3) adopt the process of sputtering or vapor deposition metal film, then deposit aluminum and gold on the glass substrate obtained in step 2) to form the metal layer of the micro-cantilever beam and the metal layer forming the biochemical probe attachment layer, the thickness of aluminum is 2 ...

Embodiment 2

[0076] Sensor Structure Reference figure 2 , 3 , to make an integrated grating micro-cantilever biochemical sensor of the present invention, the specific preparation steps are as follows:

[0077] 1). First clean the glass sheet, apply photoresist on it, and photolithographically form electrodes, lead pads and grating patterns;

[0078] 2). Then, on the glass substrate obtained in step 1), chromium and gold are deposited by sputtering or vapor deposition of metal thin film. The thickness of chromium is 8 nanometers, and the thickness of gold is 100 nanometers; process to form electrodes, lead pads and gratings; the gratings have a width of 3 microns and a pitch of 3 microns;

[0079] 3) On the glass substrate obtained in step 2), use PECVD to deposit 200 nanometers of thick silicon dioxide as an insulating layer, coat photoresist on it, and photolithography to form a pattern, corrode silicon dioxide, and expose the micro-cantilever anchor point and Pressure solder block. ...

Embodiment 3

[0094] Sensor Structure Reference figure 2 , 3 , make an integrated grating micro-cantilever biochemical sensor of the present invention, the specific preparation steps of the biochemical sensor chip of the embodiment are as follows:

[0095] 1). First clean the glass substrate, deposit chromium and gold on it by sputtering or vapor deposition of metal film, the thickness of chromium is 5 nanometers, and the thickness of gold is 100 nanometers; photolithography, corrosion of chromium / gold, forming Gratings, electrodes, and lead pads, the gratings have a width of 5 microns and a pitch of 5 microns;

[0096] 2) On the glass substrate obtained in step 1), deposit 200 nanometers thick Parylene by CVD as an insulating layer, coat photoresist on it, and photolithographically etch to form a pattern, exposing the anchor point of the micro-cantilever beam and the welding pad .

[0097] 3) On the glass substrate obtained in step 2), metal copper is sputtered as a sacrificial layer, ...

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Abstract

The invention relates to an integrated grating micro-cantilever biochemical sensor and a chip manufacturing method, comprising metal grating and an electrode arranged at the surface of a glass sheet; an insulating layer is covered onto the electrode and the grating, and the glass sheet is provided with a micro-cantilever structure and a specific adsorption layer on the upper surface of the micro-cantilever, and a certain clearance is arranged between the micro-cantilever and the grating, a photoelectric detective circuit is connected with the electrode. The characteristic that the light intensity of the diffraction light spot changes along with the sensitivity of the distance from the grating surface to the lower reflecting surface of the micro-cantilever is utilized to realize the biochemical testing of high sensitivity. The MEMS technology and the mature laser diode, photodetector are utilized, and the mass production can be conducted, and the invention is easy to popularize and apply.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems (MEMS) and sensing technology, and in particular relates to an integrated grating micro-cantilever biochemical sensor that uses biochemical combined stress to bend the micro-cantilever and realizes high-resolution displacement measurement based on integrated grating interference and its production method. Background technique [0002] High-sensitivity biochemical detection technology has extensive and urgent needs in disease diagnosis, food safety, environmental monitoring, and anti-terrorism. Label-free biological detection technology has been widely valued for its simple and quick operation. [0003] High-sensitivity micro-biochemical sensors based on micro-cantilever beams have been extensively studied. In 1997, R. Berger et al. published in Science that through self-assembly experiments of thiols on gold surfaces, it was found that chemical combination changes the surface free e...

Claims

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Application Information

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IPC IPC(8): G01N33/50
Inventor 叶雄英陈烽伍康刘力涛周兆英
Owner TSINGHUA UNIV
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