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Ti-TiN-CNx gradient multilayer film and preparation method thereof

A multi-layer film, 1.ti-tin-cnx technology, applied in coatings, layered products, metal material coating processes, etc., can solve the problem of reducing the service life of wear-resistant film materials, limiting film growth thickness, and interface bonding Poor strength and other problems, to achieve the effect of reducing friction and wear, excellent friction reduction and wear resistance, biocompatibility, and improving bonding force

Active Publication Date: 2010-08-18
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to CN x The physical properties of the material between the film and the titanium alloy substrate are completely different, the interface bonding strength between the film and the substrate is poor, and there is a large internal stress between the film and the substrate, which limits the growth thickness of the film (the deposition thickness is generally less than 0.5μm), which reduces the service life of wear-resistant film materials

Method used

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  • Ti-TiN-CNx gradient multilayer film and preparation method thereof
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  • Ti-TiN-CNx gradient multilayer film and preparation method thereof

Examples

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Effect test

Embodiment 1

[0016] Preparation of Ti-TiN-CN by Unbalanced Magnetron Sputtering x Gradient multilayer film, the steps are as follows:

[0017] 1) Place a pure graphite target and a metal Ti target in two directions perpendicular to the horizontal plane and parallel to each other; place a titanium alloy substrate on the turntable in the magnetron sputtering reaction chamber, control the rotating speed of the turntable to 15rpm, and adjust the distance between the substrate and the target. The distance is 9cm;

[0018] 2) Vacuumize the reaction chamber to 3.0×10 -3 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.07A and a negative bias voltage of 220V for 30 minutes;

[0019] 3) Introduce pure argon gas, control the flow rate of argon gas to 30sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 0.25A, and a ...

Embodiment 2

[0022] Preparation of Ti-TiN-CN by Unbalanced Magnetron Sputtering x Gradient multilayer film, the steps are as follows:

[0023] 1) Place a pure graphite target and a metal Ti target in two directions perpendicular to the horizontal plane and parallel to each other; place a titanium alloy substrate on the turntable in the magnetron sputtering reaction chamber, control the rotating speed of the turntable to 15rpm, and adjust the distance between the substrate and the target. The distance is 9cm;

[0024] 2) Vacuumize the reaction chamber to 3.0×10 -3 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.07A and a negative bias voltage of 220V for 30 minutes;

[0025] 3) Feed pure argon gas, control the flow rate of argon gas to 30 sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 0.25A, and a bias...

Embodiment 3

[0028] Preparation of Ti-TiN-CN by Unbalanced Magnetron Sputtering x Gradient multilayer film, the steps are as follows:

[0029]1) Place a pure graphite target and a metal Ti target in two directions perpendicular to the horizontal plane and parallel to each other; place a titanium alloy substrate on the turntable in the magnetron sputtering reaction chamber, control the rotating speed of the turntable to 15rpm, and adjust the distance between the substrate and the target. The distance is 9cm;

[0030] 2) Vacuumize the reaction chamber to 3.0×10 -3 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.07A and a negative bias voltage of 220V for 30 minutes;

[0031] 3) Introduce pure argon gas, control the argon gas flow rate to 30 sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 0.25A, and a bia...

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Abstract

The invention discloses a Ti-TiN-CNx gradient multilayer film. A pure Ti combining layer, a TiN / CNx gradient multilayer transition layer formed by alternating TiN and amorphous CNx and an amorphous CNx film layer with a graphite similar structure are sequentially arranged on a Ti alloy substrate from top to bottom. The Ti-TiN-CNx gradient multilayer film is prepared by adopting an unbalance magnetic sputtering method. The pure Ti combining layer and the TiN / CNx gradient multilayer transition layer improve the bonding force of the film and the substrate, the amorphous CNx film with a graphite similar structure has the hardness of reaching 25-35 GPa and contains lower internal stress, and the gradient multilayer film has controllable thickness. A biological friction property test is carried out in Tyrode's simulated body fluid, and the gradient multilayer film has lower friction coefficient and abrasion rate, shows excellent friction-reducing and wear-resisting property and biocompatibility, can be used for surface protection and modification of a biological material for replacing heart valve prosthesis and joint prosthesis, and greatly prolongs the service life of the material.

Description

technical field [0001] The invention relates to wear-resistant Ti-TiN-CN x Gradient multilayer film and its preparation method. Background technique [0002] Titanium alloys are widely used in various surgical fields such as artificial hip joints, knee joints, and jaw joints. With the wide application of titanium alloy materials, the complications of artificial joint replacements are also increasingly revealed. In the past ten years, research has shown that artificial joints are The wear debris generated in the joint is an important factor leading to aseptic loosening and artificial joint failure. Therefore, improving the tribological properties of titanium alloy materials is an important measure to reduce the friction and wear of artificial joints, improve the utilization rate and life of artificial joint materials, and reduce the incidence of aseptic loosening complications. [0003] A common way to improve the material is to modify the surface of the material or deposit...

Claims

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Application Information

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IPC IPC(8): B32B9/04C23C14/35C23C14/06
Inventor 涂江平刘东光王秀丽谷长栋洪春福
Owner ZHEJIANG UNIV
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