Microwave synthesis method for aluminum nitride powder

Abstract

The invention relates to a microwave synthesis method for aluminum nitride powder. In the method, microwave synthesis is performed by using aluminum powder as a raw material and comprises the following steps of: thoroughly and uniformly mixing the aluminum powder with particle size smaller than 0.5 millimeters and ammonium salt according to a proportion; placing the mixture according to a figure 1 and putting the mixture into a microwave synthesis reaction cavity, wherein the microwave frequency is 2, 450 MHz, the pressure is the normal pressure and the synthesis temperature is between 600 DEG C and 1,300 DEG C; introducing nitrogen-containing atmosphere for microwave synthesis; keeping the temperature for 0 to 5 hours; and cooling the synthesized product to obtain the finished product of the aluminum nitride powder. In the microwave synthesis method, heat is generated by coupling a special wave band of the microwave and a basic structure of the material and the dielectric loss of the material makes the material heated in an integral heating way which is different from the conventional heating way through convection, conduction or radiation; and the method has the advantages of low synthesis temperature, short synthesis time, low energy consumption of synthesis, high yield, high product performance, simple process and the like and can realize large-scale industrial production.

Description

technical field [0001] The invention relates to a preparation method of fine ceramic powder, in particular to a microwave synthesis method of aluminum nitride powder. Background technique [0002] Aluminum nitride ceramics have a series of excellent properties such as high thermal conductivity, low thermal expansion coefficient, low dielectric constant and low dielectric loss, non-toxic, and good insulation. They are considered to be a new generation of semiconductor substrates and ideal semiconductor packaging materials. It is widely used in the electronics industry and in high temperature and strong corrosive environments, and has become one of the research hotspots in the field of modern new materials. [0003] High-quality aluminum nitride powder is the key factor that determines the performance of aluminum nitride ceramics. At present, there are five main methods for preparing aluminum nitride powder: [0004] 1. Aluminum powder direct nitriding method. The reaction e...

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Problems solved by technology

The main disadvantages of this method are low efficiency, complex equipment, incomplete reaction, and difficulty in production and application.

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