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Ion beam surface treatment equipment and method for suppressing secondary electron emission

A secondary electron emission and surface treatment technology, applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of reducing the collector efficiency of traveling wave tubes, increasing high-frequency heat dissipation power, and reducing the efficiency of traveling wave tubes. Achieve the effect of low processing cost, secondary electron emission suppression, and simple processing

Active Publication Date: 2010-12-08
北京真空电子科技有限公司
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Problems solved by technology

These energetic electrons appear near the collectors of all levels, and when they hit the collectors again, they will cause considerable energy loss, thereby reducing the efficiency of the collectors of the traveling wave tube, and at the same time increasing the temperature of the tube body, further reducing the traveling wave tube temperature. The efficiency of the wave tube; the existence of a large number of low-energy secondary electrons may also cause backflow, increase high-frequency heat dissipation power and form noise

Method used

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  • Ion beam surface treatment equipment and method for suppressing secondary electron emission
  • Ion beam surface treatment equipment and method for suppressing secondary electron emission
  • Ion beam surface treatment equipment and method for suppressing secondary electron emission

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Embodiment Construction

[0022] refer to figure 1 , showing a schematic diagram of ion beam surface treatment equipment that suppresses secondary electron emission. In the figure, the mechanical pump 5 in the pre-vacuum is connected to the secondary vacuum molecular pump 4 and the sample stage assembly 3, and a sputtering device is arranged above the sample stage assembly. The deposition assembly 2 is provided with a Kaufmann ion source 1 above the sputtering deposition assembly, and they form a sealed vacuum device, which is also connected to an electric control cabinet 6 .

[0023] refer to figure 2 , represents a structural diagram of the sputtering deposition assembly, which is a ring-like structure with multiple fins on the edge, 2-1 in the figure is the fins, and there are gaps 2-2 between the fins.

[0024] refer to image 3 , represents the flow chart of the ion beam surface treatment method for suppressing secondary electron emission, in which the operation is performed according to the fo...

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Abstract

The invention discloses ion beam surface treatment equipment and an ion beam surface treatment method for suppressing secondary electron emission, which belong to the field of vacuum electronic technology. The equipment comprises a mechanical pump in a forvacuum state, a secondary vacuum molecular pump and a sample table component, wherein a sputtering deposition component and an ion source are arranged above the sample table component. The method used by the equipment comprises the following steps of: vacuumizing a system; heating a sample; filling an argon gas; performing ion source sputtering; cooling the sample; and detecting a coefficient value of the secondary electron emission by using a special instrument. The equipment and the method effectively suppress the secondary electron emission; and a molybdenum target used in the equipment is simple to machine and low in cost.

Description

technical field [0001] The invention belongs to the technical field of vacuum electrons, and in particular relates to an ion beam surface treatment device and method for suppressing secondary electron emission of an electrode bombarded by electrons in a vacuum state. Background technique [0002] Traveling wave tubes are widely used in radar, electronic warfare, satellite communication and precision guidance and other weapons and equipment. In recent years, the demand for traveling wave tubes has been increasing, and at the same time, higher requirements have been put forward for the performance of traveling wave tubes, including higher overall tube efficiency. Higher overall tube efficiency not only means reducing the power consumption of the traveling wave tube, reducing the weight and volume of the power supply, but also means providing space for improving the reliability and life of the device. This is especially important for airborne and space traveling wave tubes, be...

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Application Information

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IPC IPC(8): H01J37/34
Inventor 丁明清冯进军白国栋瞿波
Owner 北京真空电子科技有限公司
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