Making method of electrical absorption modulation tunneling injection type distributed feedback semiconductor laser
A technology of electro-absorption modulation and distributed feedback, which is applied to semiconductor lasers, devices for controlling output parameters of lasers, lasers, etc., can solve problems such as high technological level requirements, influence, and quantum well thickness, so as to improve the characteristic temperature and eliminate the influence , high reliability effect
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[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0028] The present invention proposes a novel electroabsorption modulation distribution feedback semiconductor laser, which adopts a tunneling injection laser structure, uses the inner confinement layer of the lower waveguide as the main light absorption region of the modulator, can relatively independently optimize the performance of the laser and the modulator, and only needs One-time epitaxy of the active region, the process is simple and reliable, and the cost is low.
[0029] Such as figure 1 as shown, figure 1 It is a flowchart of a method for manufacturing an electroabsorption modulation tunneling injection distributed feedback semiconductor laser provided by the present invention, and the method includes the foll...
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