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34 results about "Tunnel injection" patented technology

Tunnel injection is a field electron emission effect; specifically a quantum process called Fowler–Nordheim tunneling, whereby charge carriers are injected to an electric conductor through a thin layer of an electric insulator.

Making method of electrical absorption modulation tunneling injection type distributed feedback semiconductor laser

The invention discloses a making method of an electrical absorption modulation tunneling injection type distributed feedback semiconductor laser, which comprises the following steps of: 1, growing an n-type indium phosphide buffer layer, a lower waveguide external limit layer, a lower waveguide internal limit layer, an indium phosphide tunneling barrier layer, a multiple quantum well active layer and an upper waveguide limit layer on an n-type indium phosphide substrate during the same epitaxy; 2, making a Bragg grating in a laser region, then epitaxially growing a p-type indium phosphide grating covering layer, an InGaAsP etching stopping layer, a p-type indium phosphide covering layer and a p+ InGaAs electrode contact layer largely; and 3, etching a ridge type optical waveguide on an epitaxial wafer, injecting with He ions to improve the resistance of an isolation region, and then passivating and flatting the surface and finally making a p-type and an n-type electrodes. The invention has the advantages of simple process and high reliability, eliminates the influence of hot electrons on the property of the laser, improves the characteristic temperature of the laser, and can realize a certain independent optimization on the laser and a modulator.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Enhancement mode device based on fluoride ion injection and manufacturing method thereof

The invention discloses an enhancement mode device based on fluoride ion injection and a manufacturing method of the enhancement mode device based on fluoride ion implantation. The enhancement mode device based on fluoride ion injection comprises a substrate, an epitaxy multilayered structure formed on the substrate, a grid electrode, a source electrode and a drain electrode, wherein the grid electrode, the source electrode and the drain electrode are arranged on the epitaxy multilayered structure, and fluoride ions are injected in a heterogeneous structure layer below the grid electrode in a tunnel injection mode and are used for using up two-dimensional electron gas in the heterogeneous structure layer. As the fluoride ions are injected in the heterogeneous structure layer below the grid electrode in the tunnel injection mode and use up the two-dimensional electron gas in the heterogeneous structure layer below the grid electrode, the enhancement mode gallium nitride device is achieved. Meanwhile, unstable fluoride ions are removed through high temperature annealing, crystal lattices recover from damage caused when the fluoride ions are injected, and a crystalline state medium layer is utilized for protecting surfaces of nitride materials produced during high temperature annealing.
Owner:ENKRIS SEMICON

Making method of electrical absorption modulation tunneling injection type distributed feedback semiconductor laser

The invention discloses a making method of an electrical absorption modulation tunneling injection type distributed feedback semiconductor laser, which comprises the following steps of: 1, growing an n-type indium phosphide buffer layer, a lower waveguide external limit layer, a lower waveguide internal limit layer, an indium phosphide tunneling barrier layer, a multiple quantum well active layerand an upper waveguide limit layer on an n-type indium phosphide substrate during the same epitaxy; 2, making a Bragg grating in a laser region, then epitaxially growing a p-type indium phosphide grating covering layer, an InGaAsP etching stopping layer, a p-type indium phosphide covering layer and a p+ InGaAs electrode contact layer largely; and 3, etching a ridge type optical waveguide on an epitaxial wafer, injecting with He ions to improve the resistance of an isolation region, and then passivating and flatting the surface and finally making a p-type and an n-type electrodes. The invention has the advantages of simple process and high reliability, eliminates the influence of hot electrons on the property of the laser, improves the characteristic temperature of the laser, and can realize a certain independent optimization on the laser and a modulator.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Single-polycrystalline EEPROM switch unit structure

PendingCN114284282ATrimming is repeated and preciseRepeatable and precise repeatabilitySolid-state devicesRead-only memoriesTunnel injectionEngineering
The invention discloses a single-polycrystalline EEPROM (Electrically Erasable Programmable Read-Only Memory) switch unit structure, which belongs to the field of microelectronic devices and comprises a p-type Si substrate, a shallow trench isolation (STI), a gate oxide layer, a polycrystalline layer and a liner. A high-voltage p well and a high-voltage n well are formed on the p-type Si substrate; the surface of the p-type Si substrate is divided into three areas, namely a switch tube area, a programming tube area and a control gate area, by a plurality of STIs (shallow trench isolators); a tunneling injection layer is formed on the surface of the programming tube region through n-type ion doping; the gate oxide layer is located on the surface of the p-type Si substrate; the polycrystalline layer is deposited on the surface of the gate oxide layer and covers the switch tube region, the programming tube region, the control gate region and the shallow trench isolation STI; the pads are located on the two sides of the polycrystalline layer, and an N + ion implantation layer and a P + ion implantation layer are formed on the p-type Si substrate through the gate self-alignment process of the pads. According to the invention, a repeated and accurate trimming function can be realized; the method has the prominent advantages of flexible trimming, high trimming yield, low process cost, easy realization of process transplantation and the like.
Owner:58TH RES INST OF CETC
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