The invention discloses a
tunnel injection super junction structure, a power device and a preparation method, and belongs to the technical field of power device preparation, the super junction structure comprises at least two adjacent epitaxial
layers, and each epitaxial layer comprises an epitaxial region and a
dielectric cylinder region; the
dielectric cylinder region on the upper layer is formed by tunnel
ion implantation, a CSL region is arranged in the epitaxial layer on the lower layer, and the CSL region is arranged below the N-type epitaxial region or the N-type
dielectric cylinder region and is in contact with the N-type epitaxial region or the N-type
dielectric cylinder region in the upper layer and the lower layer. The tunnel
ion implantation technology is applied in the multi-time epitaxial process, so that the problems of large required implantation energy, shallow implantation depth and multiple epitaxial times in the traditional multi-time epitaxial process are solved.