Irreversible bonding method using polydimethylsiloxane as substrate material
A polydimethylsiloxane and bonding technology, which is applied in the field of microfluidic chips, can solve the problems of high equipment requirements, narrow bonding range, low bonding strength, etc., and achieve simple processing technology and synthetic bonding Low cost and high bonding strength
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Embodiment 1
[0028] refer to Figure 1-Figure 5 , this embodiment is an irreversible bonding method using PDMS as the bonding component material and using PDMS as the base component material, which specifically includes the following steps:
[0029] Step 1: Put the PDMS bonded component 2 in analytically pure acetone for ultrasonic cleaning, and dry it. For bonded component 2, refer to figure 1 ;
[0030] Step 2: ultrasonically clean the PDMS bonding assembly 2 in analytically pure isopropanol, and blow dry;
[0031] Step 3: Place the PDMS substrate assembly 3 in analytically pure ethanol for ultrasonic cleaning, rinse with deionized water, and dry it. For substrate assembly 3, refer to figure 2 ;
[0032] Step 4: Bake the PDMS bonding assembly 2 and the base assembly 3 in an oven at 80 degrees for 10 minutes;
[0033] Step 5: Treat the bonded surfaces of PDMS bonding component 2 and base component 3 for 20 seconds at the highest intensity of the corona discharge apparatus model BD-20...
Embodiment 2
[0036] This embodiment is an irreversible bonding method using PDMS as the bonding component material and PMMA as the base component material, which specifically includes the following steps:
[0037] Step 1: ultrasonically clean the PDMS bonded components in analytically pure acetone, and blow dry;
[0038] Step 2: ultrasonically clean the PDMS bonded components in isopropanol of analytical grade, and blow dry;
[0039] Step 3: ultrasonically clean the PMMA substrate assembly in analytically pure ethanol, rinse with deionized water, and dry;
[0040] Step 4: Bake the PDMS bonded assembly and the PMMA substrate assembly in an oven at 100 degrees for 8 minutes;
[0041] Step 5: Treat the bonding surfaces of the PDMS bonding component and the substrate component separately with a corona discharge apparatus;
[0042] Step 6: Bond the PDMS bonded component and the PMMA substrate component directly. In order to increase the bonding strength between the PDMS bonded component and t...
Embodiment 3
[0044] This embodiment is an irreversible bonding method using PDMS as the bonding component material and silicon wafer as the base component material, which specifically includes the following steps:
[0045] Step 1: ultrasonically clean the PDMS bonded components in analytically pure acetone, and blow dry;
[0046] Step 2: ultrasonically clean the PDMS bonded components in isopropanol of analytical grade, and blow dry;
[0047] Step 3: ultrasonically clean the silicon wafer substrate assembly in analytically pure ethanol, rinse with deionized water, and dry;
[0048] Step 4: Bake the PDMS bonding assembly and the substrate assembly in an oven at 120 degrees for 5 minutes;
[0049] Step 5: Treat the bonding surfaces of the PDMS bonding component and the substrate component separately with a corona discharge apparatus;
[0050] Step 6: Directly bond the PDMS bonding component and the silicon wafer substrate component, so far, the bonding is completed.
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