Preparation method for magnetron sputtering TiMo film on titanium alloy surface

A magnetron sputtering and titanium alloy technology, applied in sputtering coating, metal material coating process, ion implantation coating, etc., can solve the erosion damage of compressor parts, damage to engine performance, and poor erosion resistance and other problems, to achieve the effect of strong bonding ability, good resistance to salt spray corrosion, and dense coating

Active Publication Date: 2011-07-06
沈阳天贺新材料开发有限公司
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  • Summary
  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The high-thrust ratio aero-engine compressor will use titanium alloy, but the titanium alloy itself is soft and has poor erosion resistance. Cause serious erosion damage, destroy engine performance structurally and aerodynamically, and seriously cause engine failure

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Plating TiMo Composite Coating on Metal Surface of TC11

[0025] Step 1: Pre-sputtering treatment

[0026] The workpiece to be plated is ground and polished with sandpaper, cleaned ultrasonically with acetone for 10 minutes, then cleaned with ultrasonic deionized water for 5 minutes, finally cleaned and dried with absolute ethanol, and set aside;

[0027] Step 2: Load the Furnace

[0028] Install the cleaned workpiece on the sample stage in the vacuum chamber of the H-MFD200 high-vacuum multifunctional thin film deposition system, and ensure that it is fixed to prevent it from falling off.

[0029] Step 3: Sputter TiMo layer

[0030] 1) Place the metal Ti target and Mo target on the DC cathode;

[0031] 2) Close the vacuum chamber and evacuate to 1.5×10 2 Pa;

[0032] 3) The vacuum degree reaches 1.5×10 -2 After Pa, introduce Ar gas; adjust the flow rate of the mass flow meter to adjust the air pressure to within the range of 2Pa;

[0033] 4) Ion bombardment: tur...

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Abstract

The invention discloses a preparation method for magnetron sputtering a TiMo film on a titanium alloy surface, which is characterized in that the preparation method comprises the steps of pre-sputtering treatment, substrate installation, sputtering and film forming, etc. Compared with the prior art, the invention realizes the purpose of preparing a Ti-Mo film on a titanium alloy surface by the magnetron sputtering process; a film with a thickness of 1-50 microns can be obtained by controlling the process conditions, and the film has good compactness, good bonding force with the substrate, anda controllable thickness; and a film with a uniform thickness can be obtained on a large-area substrate. The coating prepared by the invention has excellent resistance to salt spray corrosion even ata temperature of 600 DEG C, and the used preparation method can produce high-quality products with the guarantee of batch production.

Description

technical field [0001] The invention relates to a vacuum coating method on a metal surface, in particular to a method for preparing a TiMo film by magnetron sputtering on the surface of a titanium alloy. Background technique [0002] Titanium alloys are widely used in aero-engine parts due to their high specific strength and good corrosion resistance. The high-thrust ratio aero-engine compressor will use titanium alloy, but the titanium alloy itself is soft and has poor erosion resistance. Cause serious erosion damage, damage the engine performance structurally and aerodynamically, and seriously lead to engine failure. Coating a certain protective coating can improve the wear resistance and corrosion resistance of titanium alloy, prolong the service life of the compressor, and improve its working reliability. Many methods can be used to apply the protective coating, such as infiltration plating, plasma spraying, magnetron sputtering coating, etc. Among them, magnetron spu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/02C23C14/54
Inventor 高淑春胡金玲彭建人
Owner 沈阳天贺新材料开发有限公司
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