Method for recovering silicon carbide in waste cutting mortar by using ammonium bifluoride

A technology of ammonium bifluoride and cutting waste sand, which is applied in the fields of monocrystalline silicon or polycrystalline silicon processing, environment and chemical industry, can solve the problem that waste mortar cannot be processed in a timely and effective manner, achieve obvious economic and social benefits, and is simple to operate and easy to process. Achieve the effect of industrialization

A technology of ammonium bifluoride and cutting waste sand, which is applied in the fields of monocrystalline silicon or polycrystalline silicon processing, environment and chemical industry, can solve the problem that waste mortar cannot be processed in a timely and effective manner, achieve obvious economic and social benefits, and is simple to operate and easy to process. Achieve the effect of industrialization

CN102167322AInactive Publication Date: 2011-08-31TARIM UNIV

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  • Method for recovering silicon carbide in waste cutting mortar by using ammonium bifluoride
  • Method for recovering silicon carbide in waste cutting mortar by using ammonium bifluoride

Examples

Experimental program
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Effect test

Embodiment 1

[0019] During the silicon wafer processing of substrates such as solar cells or integrated circuits (semiconductors and liquid crystal displays, etc.), the waste mortar generated is pretreated to remove oil-based dispersants (such as polyethylene glycol, etc.) and a small amount of impurities (such as iron etc.), put 30 kg of sand powder (silicon carbide 86.6%, silicon 13.4%) into the container after pretreatment, and add 13 kg of ammonium bifluoride, stir evenly, add water to disperse and dissolve ammonium bifluoride gradually while reacting, to avoid becoming solid Shape, react at 50°C for 1.2 hours, add about 100 g of deionized distilled water to dissolve the reaction product ammonium fluorosilicate, control the concentration close to the saturated concentration, filter and separate, wash the solid three times to obtain 27.8 kg of wet silicon carbide, and pass through Dry to obtain finished silicon carbide; add 0.5 kg of large-grained high-purity silicon to the filtrate and ...

Embodiment 2

[0021] During the silicon wafer processing of substrates such as solar cells or integrated circuits (semiconductors and liquid crystal displays, etc.), the waste mortar generated is pretreated to remove oil-based dispersants (such as polyethylene glycol, etc.) and a small amount of impurities (such as iron etc.), put 30 kg of pretreated sand powder (silicon carbide 82.1%, silicon 17.9%) into the container, and add 17.5 kg of ammonium bifluoride, stir evenly, gradually add water to disperse and dissolve ammonium bifluoride while reacting, to avoid solidification Shape, react at 60°C for 1 hour, add deionized distilled water at about 100°C to dissolve the reaction product ammonium fluorosilicate, control the concentration close to the saturated concentration, filter and separate, and wash the solid three times to obtain 26.3 kg of wet silicon carbide. After drying, the finished silicon carbide is obtained; 0.5 kg of large-grained high-purity silicon is added to the filtrate and w...

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Abstract

The invention discloses a method for recovering silicon carbide in waste mortar generated in a process for cutting monocrystalline silicon and polycrystalline silicon rods or processing silicon chips by using ammonium bifluoride, which comprises the steps of: dissolving silicon in preprocessed waste mortar by using an ammonium bifluoride solution, adding water for dissolving to ensure that the silicon forms a solution, and filtering to obtain the silicon carbide as a target product; carrying out low-temperature crystallization on the generated ammonium fluosilicate solution, and filtering to obtain an ammonium fluosilicate product; and dissolving the ammonium fluosilicate with a crystallized water solution, and repeatedly using the ammonium fluosilicate. All components are reasonably utilized in the whole process without wastewater emission and secondary pollution, and requirements for a green chemical process are met. The invention has the advantages of higher reaction rate, milder process conditions, low equipment investment, simpleness in operation, easiness in industrialization, and remarkable economic benefit and social benefit.

Description

technical field [0001] The invention relates to waste materials produced by industries such as monocrystalline silicon or polycrystalline silicon rod processing or silicon wafer cutting, such as solar energy and semiconductor industries, specifically including the fields of monocrystalline silicon or polycrystalline silicon processing, environment and chemical industry. Background technique [0002] Wire cutting waste mortar is a kind of waste generated during the wire cutting process of high-purity monocrystalline silicon and polycrystalline silicon rods during the processing of silicon wafers. It mainly comes from substrates for integrated circuits, solar cell substrates, electronic chips, and precision semiconductors. Chips in the multi-wire cutting process of thin sheet products. The main components of wire cutting waste mortar include silicon carbide SiC, polyethylene glycol (PEG) or oil-based suspension, silicon Si and iron Fe, etc. Among them, SiC, PEG and Si are all...

Claims

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Application Information

Patent Timeline
31 Aug 2011
Publication
CN102167322A
IPC
C01B31/36
Inventors
田维亮; 白红进