Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with Doppler galvanometer

A technology of Doppler galvanometer and laser heterodyning, which is applied in the directions of measuring devices, measuring angles, surveying and navigation, etc., can solve the problems of slow signal processing speed, poor quality of collected laser difference frequency signals, etc., and achieve good application prospects and value, fast measurement speed, and good linearity

Inactive Publication Date: 2014-03-12
HARBIN INST OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the problem that the existing laser heterodyne dynamic angle measurement method has poor quality of collecting laser difference frequency signal and slow operation speed of signal processing when measuring laser incident angle, the proposed Doppler vibrating mirror sinusoidal modulation multi-beam laser Device and method for measuring laser incident angle by heterodyne second harmonic

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  • Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with Doppler galvanometer
  • Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with Doppler galvanometer
  • Device and method for measuring laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with Doppler galvanometer

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specific Embodiment approach 1

[0021] Specific implementation mode one: combine figure 1 This embodiment is described. The device for measuring the incident angle of the laser by sinusoidally modulating the multi-beam laser heterodyne second harmonic wave of the Doppler vibrating mirror in this embodiment includes a H0 solid-state laser 1, a polarizing beam splitter PBS2, and a quarter-wave plate 3. Vibrating mirror 4, flat mirror 5, glass plate of known thickness 6, converging lens 7, photodetector 8 and signal processing system 9,

[0022] The linearly polarized light emitted by the H0 solid-state laser 1 is reflected by the polarization beam splitter PBS2 and then incident on the quarter-wave plate 3, and the light beam transmitted by the quarter-wave plate 3 is incident on the light-receiving surface of the vibrating mirror 4 , the light beam reflected by the galvanometer 4 is sent to the polarization beam splitter PBS2 after being transmitted by the quarter-wave plate 3 again, and the light beam transm...

specific Embodiment approach 2

[0024] Specific embodiment two: the difference between this embodiment and specific embodiment one is that the signal processing system 9 is composed of a filter 9-1, a preamplifier 9-2, an analog-to-digital converter A / D and a digital signal processor DSP , the filter 9-1 filters the received electrical signal output by the photodetector 8 and sends it to the preamplifier 9-2, and the signal amplified by the preamplifier 9-2 is output to the analog-to-digital converter A / D, the analog-to-digital converter A / D sends the converted digital signal to the digital signal processor DSP. Other compositions and connection methods are the same as those in Embodiment 1.

specific Embodiment approach 3

[0025] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that the vibrating mirror 4 is a Doppler vibrating mirror, and the simple harmonic vibration equation of the vibrating mirror 4 is:

[0026] x(t)=x 0 cos(ω c t)

[0027] The velocity equation of the vibrating mirror 4 is:

[0028] v(t)=-ω c x 0 sin(ω c t)

[0029] In the formula, the parameter ω 0 is the laser angular frequency, parameter x 0 is the vibration amplitude of the galvanometer, parameter ω c is the angular frequency of the vibrating mirror, c is the speed of light; t is time. Other compositions and connection modes are the same as those in Embodiment 1 or 2.

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Abstract

The invention discloses a device and method for measuring a laser incident angle by sinusoidally modulating multi-beam laser heterodyne secondary harmonics with a Doppler galvanometer, which relate to a device and method for measuring a laser incident angle and are used for solving the problems of poor quality of acquired laser difference frequency signals and low operating speed of signal processing during the measurement of the laser incident angle with the conventional laser heterodyne dynamic angle measuring method. The method comprises the following steps of: making a galvanometer perform simple harmonic oscillation; starting a laser; and continually acquiring electrical signals output by a photoelectric detector by using a signal processing system, processing an acquired difference frequency signal, and obtaining an incident angle to be detected according to a ratio coefficient of the frequency of a laser heterodyne signal to a refraction angle which is formed by laser entering a glass plate of which the thickness is known. The device has the advantages of high laser difference frequency signal quality and high operating speed of signal processing, and can be widely applied to ultra-precision measurement, detection, processing equipment and laser radar systems.

Description

technical field [0001] The invention relates to a device and method for measuring laser incident angle. Background technique [0002] Precision angle measurement is a problem that needs to be faced and solved in the engineering field. With the development of science and technology, angle measurement equipment and measurement methods are constantly being introduced, such as code discs, permanent magnet synchronous motors, laser scanners, inductive synchros, space Fourier spectrometers and four-quadrant detectors, etc. A large number of applications of angle measurement devices and angle measurement equipment developed with these devices provide engineering design and inspection personnel with solutions to a large number of angle measurement problems. Angle measurement methods include CCD optical angle measurement method, PIP interferometry method, imaging grating self-collimation angle measurement method, self-collimation angle measurement method based on Moiré fringes, etc....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C1/00
Inventor 王春晖李彦超
Owner HARBIN INST OF TECH
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