Resistive humidity sensor capable of measuring humidity in low-humidity environment and manufacturing method thereof

A technology of environmental humidity and humidity sensitive components, applied in the direction of material resistance, etc., can solve the problems of insufficient humidity detection, difficulty in measurement, low conductivity, etc., and achieve the effects of avoiding processing difficulties, simple preparation process, and fast response

Inactive Publication Date: 2011-12-14
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the polymer resistive humidity sensor has become one of the focuses of the research and development of humidity sensors due to its high response sensitivity, simple preparation, low price, and easy modification and regulation. There are

Method used

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  • Resistive humidity sensor capable of measuring humidity in low-humidity environment and manufacturing method thereof
  • Resistive humidity sensor capable of measuring humidity in low-humidity environment and manufacturing method thereof
  • Resistive humidity sensor capable of measuring humidity in low-humidity environment and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0025] 2) The three-necked flask was subjected to water and oxygen removal treatment, and 10 grams of 3-aminopropyltriethoxysilane, 10 grams of bromo-n-butane and 2 milliliters of absolute ethanol were sequentially added. Nitrogen was passed for 10 minutes with stirring at room temperature, and then the temperature was raised to 30° C., and reacted for 10 hours under the protection of nitrogen. The temperature of the obtained reactant was further raised to 40° C., and 2 ml of aqueous hydrochloric acid solution with a pH value of 1 was added dropwise, and the reaction was continued for 0.5 hours. Afterwards, the reaction solution was diluted with 5 ml of absolute ethanol, precipitated in ether, then filtered, and dried in vacuo for 12 hours to obtain a light yellow solid product (trihydroxysilylpropyl) n-butylammonium bromide (APSB) ...

Embodiment 2

[0029] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0030] 2) The three-necked flask was subjected to water and oxygen removal treatment, and 12 grams of 3-aminopropyltriethoxysilane, 12 grams of bromo-n-butane and 5 milliliters of absolute ethanol were added in sequence. Nitrogen was passed for 20 minutes under normal temperature stirring, and then the temperature was raised to 40° C., and reacted for 12 hours under the protection of nitrogen. The obtained reactant was heated up to 45° C., and 3 ml of aqueous hydrochloric acid with a pH value of 1.5 was added dropwise, and the reaction was continued for 1 hour. Afterwards, the reaction solution was diluted with 8 milliliters of absolute ethanol, precipitated in ether, then filtered, and vacuum-dried for 15 hours to obtain the pale yellow solid product APSB;

[0031] 3) Disperse 4 mg of graphene oxide in 2 ml of water by ultrasonic t...

Embodiment 3

[0034] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0035] 2) The three-necked flask was subjected to water and oxygen removal treatment, and 15 grams of 3-aminopropyltriethoxysilane, 14 grams of bromo-n-butane and 3 milliliters of absolute ethanol were added in sequence. Nitrogen was passed for 25 minutes under normal temperature stirring, then the temperature was raised to 50°C, and the reaction was carried out under nitrogen protection for 20 hours. The obtained reactant was further heated to 55° C., and 3.5 ml of aqueous hydrochloric acid with a pH value of 3 was added dropwise, and the reaction was continued for 1.5 hours. Afterwards, the reaction solution was diluted with 15 milliliters of absolute ethanol, precipitated in ether, then filtered, and vacuum-dried for 20 hours to obtain the pale yellow solid product APSB;

[0036]3) Disperse 6 mg of graphene oxide in 3 ml of water...

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Abstract

The invention discloses a resistive humidity sensitive element capable of measuring the humidity in a low-humidity environment and a manufacturing method thereof. It uses ceramics as a substrate on which there are multiple pairs of interdigitated gold electrodes. On the surface of the ceramic substrate and interdigitated gold electrodes Coated with a moisture-sensitive film, the moisture-sensitive film is a cross-linked (trihydroxysilylpropyl) n-butylammonium bromide and graphene composite moisture-sensitive material. The humidity sensor is simple to prepare and has good stability, and can realize the measurement of relative humidity in almost all humidity ranges, especially it has a low resistance in a dry environment with a relative humidity lower than 10%, and can be sensitively measured Low humidity environment humidity. The element has the advantages of high response sensitivity, good response linearity, small hysteresis, rapid response, good response reproducibility, etc. It can be widely used in industrial and agricultural production, storage, atmospheric environment monitoring and other fields for environmental humidity, especially drying Accurate measurement and control of ambient humidity.

Description

technical field [0001] The invention relates to a resistance type humidity sensitive element and a manufacturing method thereof, in particular to a resistance type humidity sensitive element capable of measuring low-humidity environment humidity and a manufacturing method thereof. Background technique [0002] Humidity is an important physical quantity that characterizes the ubiquitous water vapor content in the air. Like temperature, humidity is also closely related to various activities of human production and life. In scientific research, modern agriculture, HVAC, textile, computer room, aerospace, national defense, electric power and other departments, the detection and control of humidity play a very important role. For this reason, the research and development of humidity sensors have also received widespread attention from various countries. As an ideal humidity sensor, it should have a wide detection range, and it is best to realize the full-scale detection of relat...

Claims

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Application Information

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IPC IPC(8): G01N27/04
Inventor 李扬邓超杨慕杰
Owner ZHEJIANG UNIV
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