Flexible piezoresistive flow field sensor based on single-wall carbon nanotube array and manufacturing method

Abstract

The invention discloses a flexible pressure resistance flow field sensor based on a single-wall carbon nanotube array and a manufacturing method thereof. The sensor comprises a flexible substrate, at least one group of micro-electrode pairs, and at least one group of single-wall carbon nanotube arrays, wherein each group of micro-electrode pairs comprises a first micro-electrode and a second micro-electrode which are arranged on the flexible substrate at intervals; two ends of each group of single-wall carbon nanotube arrays are respectively connected with the first micro-electrode and the second micro-electrode of one group of corresponding micro-electrode pairs, so that each group of single-wall carbon nanotube arrays can be in a stretch state, and each group of single-wall carbon nanotube arrays are spaced with the flexible substrate. The flexible pressure resistance flow field sensor based on the single-wall carbon nanotube array has the advantages of high sensitivity, small dimension, strong flexibility and low power consumption. The manufacturing method of the embodiment of the invention is simple in design and easy to implement and is suitable for mass production of the sensor.

Description

technical field [0001] The invention relates to the technical fields of sensors and precision instruments, in particular to a flexible piezoresistive flow field sensor based on a single-walled carbon nanotube array structure and a manufacturing method thereof. Background technique [0002] Flow field sensors such as flow velocity and angle of attack have important applications in aircraft, cruisers, ships and submarines. The traditional piezoresistive flow field sensor is mainly composed of rigid semiconductor materials such as silicon, which will have a certain impact on the measured object, especially the wing shape of the micro aircraft, or the method of opening the installation will not be conducive to the strength of the wing . For example, the silicon micro MEMS pressure sensor commonly used to measure the airspeed on the micro air vehicle will have a certain impact on the airfoil of the wing, whether it is installed with holes on the wing or with a pitot tube structu...

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Problems solved by technology

At present, the preparation process of carbon nanotubes cannot precisely control the chirality of carbon nanotubes, which makes it very difficult to directly mass-produce small energy gap carbon nanotube sensors with high resistance factor at low cost.

Therefore, some domestic and foreign studies on carbon nanotube flexible piezoresistive sensors mainly use carbon nanotube films or composite structures composed of carbon nanotubes and polymers as sensitive units, but no matter whether it is a film or a composite structure, Since the carbon nanotubes are a mixture of various chiralities and adhere to the substrate in a disordered manner, the sensitivity of the current carbon nanotube flexible piezoresistive sensor is not high. For example, the carbon nanotubes produced by J.P.LYNCH of the University of Michigan Tube-polymer film strain sensor with a piezoresistive factor up to only 1.8

For another example, the carbon nanotube thin film (buckypaper) strain sensor that InpilKang of U.S.A. Cincinnati University etc. makes, although adopted single-walled carbon nanotubes, but single-walled carbon nanotubes are randomly arranged on the substrate and adhered to the base, And the carbon nanotubes have not been screened, so the highest piezoresistive factor is about 7, and the sensitivity is still very low

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