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Aluminium nitride ceramic wafer and preparation method thereof

An aluminum nitride ceramic and aluminum nitride technology, which is applied in the field of ceramics, can solve the problem of being difficult to produce aluminum nitride ceramic substrates of various thicknesses, etc., and achieve the effect of wide application value and reduction of production costs.

Active Publication Date: 2012-02-08
BYD CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention is to overcome the defect that the preparation method in the prior art is difficult to be applicable to the production of aluminum nitride ceramic substrates of various thicknesses

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0028] Accordingly, the present invention provides a method for preparing an aluminum nitride ceramic substrate, comprising the following steps:

[0029] Step 1. Ingredients: Weigh the raw materials of the aluminum nitride ceramic substrate and mix them uniformly. The raw materials include aluminum nitride powder, liquid-phase sintering aids and organic mutual solvents; based on the total weight of the raw materials, the The content is: the content of aluminum nitride powder is 50wt%-70wt%, the content of sintering aid is 3wt%-5wt%, the content of organic mutual solvent is 25wt%-45wt%; more preferably, the aluminum nitride The content of the powder is 50wt%-60wt%, and the content of the organic mutual solvent is 35wt%-45wt%.

[0030] Wherein, the purity of the aluminum nitride powder is above 99%, and the average particle size is 1-2 μm. The smaller the particle size, the higher the activity of the powder, which is more conducive to densification and sintering. The aluminum n...

Embodiment 1

[0046] Step 1. Mixing materials: mix quantitative aluminum nitride powder, liquid phase sintering aid and organic mutual solvent according to the ratio of: aluminum nitride powder 65wt%, sintering aid 5wt%, organic mutual solvent 30wt% , wherein, the sintering aid is yttrium oxide and calcium oxide, the weight ratio of yttrium oxide and calcium oxide is 1:1, and the organic mutual solvent contains polyethylene 40wt%, ethylene-vinyl acetate copolymer 45wt%, hard Fatty acid 5wt%, thermoplastic elastomer 5wt%, polypropylene 2wt%, paraffin 3wt%.

[0047] Step 2. Mixing: Add the mixed raw materials into the mixer that has been preheated to 150°C, take it out after mixing for about 30 minutes, then add it to the mixer for secondary mixing at 150°C, and put it in after 30 minutes The mixture is taken out.

[0048] Step 3, crushing and granulating: the mixed material is crushed and granulated in a crusher.

[0049] Step 4, hot press forming: adjust the depth of the mold cavity to 1 ...

Embodiment 2

[0055] Step 1. Mixing materials: Mix quantitative aluminum nitride powder, liquid phase sintering aid and organic mutual solvent according to the ratio of: aluminum nitride powder 70wt%, sintering aid 5wt%, and organic mutual solvent 25wt% , wherein, the sintering aid is yttrium oxide and calcium fluoride, the weight ratio of calcium fluoride and calcium oxide is 1:4, and the organic mutual solvent contains polyethylene 40wt%, ethylene-vinyl acetate copolymer 40wt% , stearic acid 5wt%, thermoplastic elastomer 5wt%, dibutyl phthalate 2wt%, polypropylene 4wt%, paraffin 4wt%.

[0056] Step 2. Mixing: Add the mixed raw materials into the mixer that has been preheated to 160°C, take it out after mixing for about 30 minutes, and then add it to the mixer for secondary mixing at 160°C, and put it in after 45 minutes The mixture is taken out.

[0057] Step 3, crushing and granulating: the mixed material is crushed and granulated in a crusher.

[0058] Step 4, hot pressing molding: ad...

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Abstract

The invention provides an aluminium nitride ceramic wafer and a preparation method thereof. The preparation method comprises following steps of: step 1. burdening: weighing raw materials of the aluminium nitride ceramic wafer and mixing well, wherein raw materials include aluminium nitride powder, sintering aid and organic mutual solvent; step 2. milling: adding the well mixed raw materials into a preheated mixing mill for one time milling or multiple milling to prepare a milling material; step 3. hot press molding: granulating the milling material to obtain a pellet and molding a green compact through a hot press molding method in a die; step 4: removing binder from the hot press molding green compact, removing organic mutual solvent in the green compact and sintering the binder removed blank. The method provided by the invention is suitable for preparation of aluminium nitride ceramic wafers with different thicknesses, has a simple technology and is beneficial for lowering production costs of ceramic wafers.

Description

technical field [0001] The invention relates to the field of ceramics, in particular to a method for preparing an aluminum nitride ceramic substrate and an aluminum nitride ceramic substrate prepared by the method. Background technique [0002] With the development of high-power power electronics, electronic information, and semiconductor technology towards high integration, high speed, miniaturization, and intelligence, the ceramic substrate, one of the main components that plays the role of carrying elements, outreach, protection, and cooling, etc. The requirements are getting higher and higher, mainly reflected in the requirements for its thermal conductivity and dielectric properties. [0003] Among them, aluminum nitride (AlN) ceramics have attracted extensive attention from academic circles and manufacturers at home and abroad because of their excellent high thermal conductivity, low dielectric constant, thermal expansion coefficient matched with Si, and other excellen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/10C04B35/622
Inventor 周龙飞林信平
Owner BYD CO LTD