Solar heat collecting tube
A technology of solar collector tubes and sunlight, which is applied in the field of solar energy utilization, can solve problems such as performance degradation, and achieve the effect of simple structure and common materials
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Embodiment 1
[0016] Reactive magnetron sputtering is used to prepare the inner tube of the solar heat collector. The inner tube is a stainless steel tube with a length of 4.3 meters and an effective sputtered film length of 4 meters. The vacuum system adopts a vertical structure, and the stainless steel tube performs revolution and rotation at the same time. The revolution radius is 0.5 meters, the revolution period is 30 seconds, and the rotation period is 1 second. Set up 8 molecular pump systems with a pumping speed of 1600 liters / second. The total pumping speed is 12800 liters / second. Every two molecular pumps are connected in parallel and connected to two suction ports. The whole system has eight suction ports. A simple throttling baffle is set on each suction port to adjust the pumping speed to ensure the uniformity of pressure everywhere. When sputtering, four molecular pumps are turned off, and the total pumping speed will be reduced to 6400 liters / second. Three cylindrical target...
Embodiment 2
[0018] The configuration of the vacuum system is the same as that of Embodiment 1, and three cylindrical targets are set, and the target materials are aluminum, nickel and copper respectively. First sputter a layer of 70nm copper in an argon atmosphere as an infrared reflective layer; use a pure aluminum target and a nickel target to reactively sputter a light-absorbing film under an argon and oxygen atmosphere, and adjust the argon-oxygen ratio to ensure that the aluminum is completely oxidized and the total gas The amount is 4000 sccm. The sputtering time was 20 minutes, the current of the aluminum target was 40 amperes, and the current of the nickel target was changed 3 times from 25 amperes to 0 amperes. The absorber layer is deposited in 3 sublayers for a total of 40 sublayers. In each sublayer, the thickness of the aluminum oxide film is 3 nm, and the thickness of the partially oxidized nickel film varies from 0.8 nm in the lowermost sublayer to 0.4 nm in the uppermost s...
Embodiment 3
[0020] The configuration of the vacuum system is the same as that of Embodiment 1, and three cylindrical targets are set, and the target materials are aluminum, stainless steel and copper respectively. First sputter a layer of 70nm copper in an argon atmosphere as an infrared reflective layer; use a pure aluminum target and a stainless steel target to reactively sputter a light-absorbing film under an argon and oxygen atmosphere, and adjust the argon-oxygen ratio to ensure that the aluminum is completely oxidized, and the total aeration The amount is 4000 sccm. The sputtering time was 20 minutes, the current of the aluminum target was 40 amperes, and the current of the stainless steel target was changed 3 times from 30 amperes to 0 amperes. The absorber layer is deposited in 3 sublayers, for a total of 40 sublayers. In each sublayer, the thickness of the aluminum oxide film is 2.5 nm, and the thickness of the partially oxidized stainless steel film varies from 1.2 nm in the bo...
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