Metal/TiO2 composite multilayer film photocatalyst and preparation method thereof
A technology of composite multi-layer film and photocatalyst, which can be used in illumination water/sewage treatment, textile industry wastewater treatment, etc. It can solve the problems of narrow spectral response range, inability to recycle, low quantum efficiency, etc., and achieve great flexibility and reliability. Controllability, beneficial to recycling, and the effect of improving photocatalytic activity
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Embodiment 1
[0041] TiO 2 / Pt / TiO 2 The composite multilayer film photocatalyst is prepared by multiple radio frequency magnetron sputtering. Among them, TiO 2 The diameter of ceramic target and Pt target is 50mm, TiO 2 The sputtering power of the target and the Pt target were 200W and 30W respectively, and the operating frequency of the radio frequency magnetron sputtering apparatus was 13.56MHz.
[0042] ginseng figure 1 Shown, TiO 2 / Pt / TiO 2 The preparation process of composite multilayer film photocatalyst comprises the following steps:
[0043] (1), the quartz plate carrier (1.5 × 1cm 2 ) is placed in a vacuum reaction chamber, and the quartz plate carrier is placed parallel to the distance from the target (TiO 2 Ceramic target or Pt target) on the sample stage of 60mm;
[0044] (2), the pressure in the vacuum reaction chamber is reduced to 1×10 by a mechanical rotary pump or a vortex molecular pump -4 Pa;
[0045] (3), feed argon into the vacuum reaction chamber and contr...
Embodiment 2
[0063] Embodiment two (the time of Pt film layer deposition is 0 seconds):
[0064] TiO 2 / Pt / TiO 2 The composite multilayer film photocatalyst is prepared by multiple radio frequency magnetron sputtering. Among them, TiO 2 The diameter of ceramic target and Pt target is 50mm, TiO 2 The sputtering power of the target and the Pt target were 200W and 30W respectively, and the operating frequency of the radio frequency magnetron sputtering apparatus was 13.56MHz.
[0065] TiO 2 / Pt / TiO 2 The preparation process of composite multilayer film photocatalyst comprises the following steps:
[0066] (1), the quartz plate carrier (1.5 × 1cm 2 ) is placed in a vacuum reaction chamber, and the quartz plate carrier is placed parallel to the distance from the target (TiO 2Ceramic target or Pt target) on the sample stage of 60mm;
[0067] (2), the pressure in the vacuum reaction chamber is reduced to 1×10 by a mechanical rotary pump or a vortex molecular pump -4 Pa;
[0068] (3), f...
Embodiment 3
[0075] Embodiment three (the time of Pt film layer deposition is 3 seconds):
[0076] TiO 2 / Pt / TiO 2 The composite multilayer film photocatalyst is prepared by multiple radio frequency magnetron sputtering. Among them, TiO 2 The diameter of ceramic target and Pt target is 50mm, TiO 2 The sputtering power of the target and the Pt target were 200W and 30W respectively, and the operating frequency of the radio frequency magnetron sputtering apparatus was 13.56MHz.
[0077] TiO 2 / Pt / TiO 2 The preparation process of composite multilayer film photocatalyst comprises the following steps:
[0078] (1), the quartz plate carrier (1.5 × 1cm 2 ) is placed in a vacuum reaction chamber, and the quartz plate carrier is placed parallel to the distance from the target (TiO 2 Ceramic target or Pt target) on the sample stage of 60mm;
[0079] (2), the pressure in the vacuum reaction chamber is reduced to 1×10 by a mechanical rotary pump or a vortex molecular pump -4 Pa;
[0080] (3)...
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