Device and method for etching copper conducting film on glass substrate ink by using pulse laser

A glass substrate, pulsed laser technology, used in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problems of low processing efficiency, poor selectivity, and large footprint

Inactive Publication Date: 2012-04-18
SUZHOU DELPHI LASER
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Problems solved by technology

[0005] The purpose of the present invention is to provide a device and method for pulse laser etching copper conductive film on glass substrate ink, aiming ...

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  • Device and method for etching copper conducting film on glass substrate ink by using pulse laser
  • Device and method for etching copper conducting film on glass substrate ink by using pulse laser

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Embodiment Construction

[0014] The invention uses laser etching copper conductive film and ITO thin film material of electronic products, adopts high-frequency pulse laser, the processed material is copper film and ITO material with high conductivity, and the laser is focused on the copper film and ITO thin film material, so as to achieve etching Effect.

[0015] The processing material film layers are glass substrate, black ink, total reflection dielectric film, ITO and copper conductive film from bottom to top. When the high-frequency pulsed laser is focused on the upper surface of the copper film and the device is etching, after reaching the removal energy threshold of the material, the copper film and ITO thin film materials are vaporized under the action of the high-frequency pulsed laser to achieve the etching process. Purpose, when the copper film and ITO are etched completely, when the high-frequency pulsed laser acts on the total reflection dielectric film of the laser wavelength, according ...

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Abstract

The invention relates to a device and a method for etching a copper conducting film on glass substrate ink by using pulse laser. An optical gate and a beam expander are arranged at the output end of a high-frequency pulse laser in turn; a 1/2 wave plate and a Glan prism are arranged at the output end of the beam expander in turn; a high-reflectivity lens is arranged at the output end of the Glan prism; a total reflection mirror is arranged at the output end of the high-reflectivity lens; a vibrating mirror field lens system is arranged at the output end of the total reflection mirror; the output end of the vibrating mirror field lens system is opposite to a four-axis high-accuracy platform; a charge coupled device (CCD) contrapuntal observation system is arranged above the four-axis high-accuracy platform; a plasma air blowing system is arranged on one side of the four-axis high-accuracy platform, and a dust collection system is arranged on the other side of the four-axis high-accuracy platform; a real-time power monitoring probe is also arranged at the output end of the high-reflectivity lens and is connected with the vibrating mirror field lens system through a communication system and a control system; and the high-frequency pulse laser is used for etching lines of a copper conducting film layer in an invisible area of a black ink substrate on glass.

Description

technical field [0001] The invention relates to a pulse laser etching device and method for a copper conductive film on a glass substrate ink, belonging to the technical field of laser micromachining. Background technique [0002] A capacitive touch screen is generally composed of a cover glass, an upper-line conductive sensing film layer, and a lower-line conductive sensing film layer. Among them, the main function of the cover glass is to protect the capacitive sensing film layer below, and at the same time print black ink on the back edge of the cover glass. The functions of the surrounding ink mainly have the following three functions. The first is to be beautiful; the second is to The purpose of shielding the edge lines of the invisible area; the third is to facilitate the printing of graphic symbols such as product logos. Generally, there are two types of conductive sensing film substrates: PET and glass. Among them, although the PET sensing film layer is relatively...

Claims

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Application Information

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IPC IPC(8): B23K26/36B23K26/14B23K26/04B23K26/42B23K26/03B23K26/064B23K26/142B23K26/362B23K26/70
Inventor 赵裕兴狄建科蔡仲云
Owner SUZHOU DELPHI LASER
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