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Preparation method and product of hafnium dioxide film on fastener surface

A hafnium dioxide and fastener technology, applied in the field of thin film preparation, can solve the problems of fasteners with no insulation, poor corrosion resistance, large surface roughness, etc., and achieve excellent and complete coverage and firm surface coating. , the effect of simple equipment operation

Inactive Publication Date: 2012-05-30
英作纳米科技(北京)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Its disadvantage is that the electroplating process is prone to hydrogen embrittlement, resulting in stress concentration during application, fracture and uneven coating distribution; if the blackened fastener is not oiled, it has almost no anti-rust ability and the torque-preload is consistent Although phosphating avoids the problem of hydrogen embrittlement and has good torque-preload consistency, its corrosion resistance is worse than that of galvanizing
The disadvantage is that the coating thickness is not easy to control
The disadvantage is that the coating is uneven or the temperature is high, etc.
Its disadvantage is that the equipment is complicated, and it is not suitable for small-sized, high-volume titanium alloy fasteners, such as surface strengthening of bolts, screws or nuts
Its disadvantage is that it is limited to titanium alloy fasteners. In addition, due to the alloy composition requirements, the surface treatment of fasteners is limited, and the formed strengthening film has micropores, which is not good for later practical applications.
However, the types of film materials prepared by PVD technology are limited, and the thickness of the preparation is generally at the micron level. It cannot be guaranteed that all threads are covered with film. The uniformity of the film is poor, the surface roughness is large, and the surface colors that can generally be obtained are also limited. Preparation of surface decoration film suitable for ultra-fine precision parts
[0011] However, in the above-mentioned various methods, it mainly involves the preparation of some coatings with high strength, high hardness, corrosion resistance, high adhesion and other properties, and it cannot realize that the color of the fastener can be freely selected according to the demand in the visible light range. regulation, and the treated fasteners do not yet have good insulating properties

Method used

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  • Preparation method and product of hafnium dioxide film on fastener surface
  • Preparation method and product of hafnium dioxide film on fastener surface
  • Preparation method and product of hafnium dioxide film on fastener surface

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preparation example Construction

[0034] Such as figure 1 Shown, the preparation method of a kind of fastener surface hafnium dioxide thin film of the present invention comprises:

[0035] Step S10: setting the fastener in the reaction chamber, and vacuuming the reaction chamber; wherein, the temperature of the reaction chamber can be 20-500° C., and the vacuum degree of the reaction chamber can be 1×10 -2 -7×10 -3 Torr.

[0036]Step S20: Pulse pressing a certain amount of the first precursor into the reaction chamber, the pressed first precursor is soaked and adsorbed on the surface of the fastener, and the excess first precursor is removed by pumping; That is, since the reaction chamber has been vacuum-processed, the first precursor is pressed into the reaction chamber due to the pressure difference, and the pulse of the first precursor can be realized by setting a special valve body. The special valve body is a commercially available mature product, and will not be repeated here.

[0037] Step S30: Pul...

Embodiment 1

[0060] Such as image 3 As shown, a screw 10 with an outer diameter of 5mm is placed in the reaction chamber of the atomic layer deposition equipment, and the vacuum degree of the reaction chamber is 1×10 -2 Torr, the temperature of the reaction chamber is 20°C, the heating temperature of the hafnium-containing precursor is 20°C, the flow rate of the carrier gas is 50 sccm, and the pulse HfCl 4 Precursor 1S, pumping 20S, then pulse H 2 O precursor 0.1S, pumping for 50S, alternate cycle pulse 10,000 times in sequence to obtain HfO 2 Thin film 20 has a thickness of about 900-1000 nm.

[0061] After the thin film is deposited, the screw 10 not only has the advantages of high strength, high hardness, corrosion resistance, oxidation resistance and high adhesion, but also has good insulation effect.

[0062] In addition, the surface color of the screw 10 is purple.

Embodiment 2

[0064] Such as Figure 4 As shown, a gasket 11 with an inner diameter of 5mm is placed in the reaction chamber of the atomic layer deposition equipment, and the vacuum degree of the reaction chamber is 1×10 -3 Torr, the temperature of the reaction chamber is 250°C, the heating temperature of the hafnium-containing precursor is 75°C, the flow rate of the carrier gas is 10 sccm, and the pulse Hf(NMe 2 ) 4 Precursor 0.02S, pumping 1S, then pulse H 2 O precursor 0.015S, evacuation 1S, alternate cycle pulse 500 times in sequence to obtain HfO 2 Thin film 20 has a thickness of about 45-55 nm.

[0065] After the thin film is deposited, the gasket 11 not only has the advantages of high strength, high hardness, corrosion resistance, oxidation resistance and high adhesion, but also has good insulation effect.

[0066] In addition, the surface color of the gasket 11 is light blue.

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Abstract

The invention discloses a preparation method of a hafnium dioxide film on a fastener surface. The method comprises steps of: arranging a fastener in a reaction cavity and carrying out vacuum treatment on the reaction cavity; pressing first precursors into the reaction cavity by pulse, infiltrating and adsorbing the first precursors on a fastener surface and removing superfluous first precursors; pressing second precursors into the reaction cavity by pulse, adsorbing the second precursors with the first precursors on the fastener surface and removing superfluous second precursors and by-products; repeating the above steps till deposition of a hafnium dioxide film of a required thickness. The first precursors are precursors containing hafnium, and the second precursors are precursors containing oxygen; or the first precursors are precursors containing oxygen, and the second precursors are precursors containing hafnium. The invention also discloses a novel fastener. The method is simply operated and easy to control a film thickness; the film has a uniform thickness and good cladding property, can be firmly combined with the fastener and is suitable for preparing a fastener product with insulation characteristic and adjustable surface color.

Description

technical field [0001] The invention relates to a method for preparing a film, in particular to a method for preparing a hafnium dioxide film on the surface of a fastener and a product thereof. Background technique [0002] Fasteners, also known as standard parts, are used to fasten two or more parts to form a whole, which are widely used in machinery, equipment, vehicles, ships, railways, bridges, buildings, structures, tools, instruments , instruments and supplies and other fields. At present, almost all commercial fasteners are made of carbon steel, alloy steel, and some types of fasteners are expected to prevent corrosion. Even with fasteners that use corrosion-resistant materials, surface treatments are still required to prevent corrosion of different materials. . Surface treatment is the process of forming a covering layer on the surface of the workpiece through a certain method, and its purpose is to endow the surface of the product with beautiful and anti-corrosion...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/40C23C16/455F16B35/00F16B37/00F16B43/00
Inventor 吴东陈宇林郭敏高洁王东君
Owner 英作纳米科技(北京)有限公司
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