Method for preparing large-size molybdenum plates for sputtering targets of liquid crystal display (LCD) flat-panel displays

A flat-panel display and sputtering target technology, which is applied in sputtering coating, metal material coating process, ion implantation coating, etc., can solve the problems of reducing the rolling force of molybdenum plate and the serious temperature drop of the billet, and achieves the solution The effect of severe billet temperature drop, solving oxidation problems, preventing uneven growth and recrystallization

Active Publication Date: 2012-07-04
XIAN REFRA TUNGSTEN & MOLYBDENUM
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  • Summary
  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

This method adopts the way of painting anti-oxidation coating and steel ladle cover, which solves the problem of oxidation in the process of heating and rolling, and the problem of serious temperature drop of the billet in the process of taking out the furnace and rolling, and at the same time reduces the rolling force of the molybdenum plate. The smooth progress of rolling is guaranteed; the total processing rate of the

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Step 1, the size of the molybdenum slab that is pressed and sintered in a conventional method is 130 mm * 800 mm * 1000 mm, and the surface of the molybdenum slab is evenly coated with an anti-oxidation coating with a thickness of about 2.5 mm; the anti-oxidation coating is glass powder, water glass and water The slurry mixed according to the mass ratio of 10:1:10; the glass powder is composed of the following components in weight percent: 75% silicon dioxide, 20% boron trioxide, 2% aluminum oxide, 2% oxide Zinc, the balance being potassium oxide;

[0022] Step 2, coating the molybdenum slab with an anti-oxidation coating in step 1 with a steel ladle cover with a thickness of 20mm; the material of the ladle cover is 45# steel plate;

[0023] Step 3: Heat the molybdenum slab coated with a ladle in step 2 to 1400°C in an air single preheating pusher type heating furnace, and then roll it once, and then place the rolled molybdenum slab Cooling on a cooling bed; the proces...

Embodiment 2

[0029] Step 1, the surface of the molybdenum slab with the size of 100mm * 700mm * 900mm pressed and sintered by the conventional method is evenly coated with an anti-oxidation coating with a thickness of about 2mm; the anti-oxidation coating is glass powder, water glass and water according to A slurry mixed with a mass ratio of 9:1:9; the glass powder is composed of the following components in weight percent: 75% silicon dioxide, 20% boron trioxide, 2% aluminum oxide, 2% zinc oxide , the balance being potassium oxide;

[0030] Step 2, coating the molybdenum slab with an anti-oxidation coating in step 1 with a steel ladle cover with a thickness of 15mm; the material of the ladle cover is 45# steel plate;

[0031] Step 3, heating the molybdenum slab coated with a ladle in step 2 to 1350°C and rolling it once, and then cooling the rolled molybdenum slab on a cooling bed; The pass processing rate is 28%, 23% and 18.5% respectively, and the total rolling processing rate is 55%; ...

Embodiment 3

[0037] Step 1, the size of the molybdenum slab of 55mm * 600mm * 800mm that is pressed and sintered in a conventional method is evenly coated with an anti-oxidation coating with a thickness of about 1.5mm; the anti-oxidation coating is glass powder, water glass and water The slurry mixed according to the mass ratio of 8:1:8; the glass powder is composed of the following components in weight percent: 75% silicon dioxide, 20% boron trioxide, 2% aluminum oxide, 2% oxide Zinc, the balance being potassium oxide;

[0038] Step 2, coating the molybdenum slab with an anti-oxidation coating in step 1 with a steel ladle cover with a thickness of 10mm; the material of the steel ladle cover is Q235 steel plate;

[0039]Step 3, heating the molybdenum slab coated with a ladle in step 2 to 1300°C and then rolling it once, and then placing the rolled molybdenum slab on a cooling bed to cool; each of the rolled The pass processing rate is 25%, 21.5% and 15% respectively, and the total rolling...

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Abstract

The invention discloses a method for preparing large-size molybdenum plates for sputtering targets of liquid crystal display (LCD) flat-panel displays, which comprises: 1), uniformly brushing an antioxidation coating on the surface of a molybdenum plate blank by pressing and sintering by the conventional process; 2), covering the molybdenum plate blank with the antioxidation coating with a steel capsule; 3), rolling the molybdenum plate blank covered with the steel capsule by one time of heating, and cooling the rolled molybdenum plate blank on a cold bed; 4), rolling the cooled molybdenum plate blank till the thickness (including the steel capsule) of the molybdenum plate blank is between 19 and 24 millimeters; 5), leveling the rolled molybdenum plate blank, removing the steel capsule, cutting the molybdenum plate blank and obtaining semi-finished molybdenum plates; and VI, performing the vacuum heat treatment of the semi-finished molybdenum plates, and obtaining the large-size molybdenum plates for the sputtering targets of the LCD flat-panel display. The large-size molybdenum plates for the sputtering targets of the LCD flat-panel display, which are prepared by the method of the invention, have flat surfaces, the density of the plates is more than or equal to 10.15g/cm<3>, the microscopic structure of the plates is uniform equiaxial structure, and the average grain size of the plates is not more than 200 mu m.

Description

technical field [0001] The invention belongs to the technical field of preparing molybdenum plates for sputtering targets, and in particular relates to a method for preparing large-size molybdenum plates for LCD flat panel display sputtering targets. Background technique [0002] Large-sized molybdenum plates with a thickness of 14mm-18mm, a width of 1000mm-1800mm, and a length of 1300mm-2200mm can be used to process sputtering targets for LCD flat panel displays of the 4.5th generation to 6th generation lines. This type of molybdenum plate has high technical requirements, and the density requirement is not less than 10.15g / cm 3 , The microstructure is required to be a uniform equiaxed grain structure, the average grain size does not exceed 200μm, and the board surface is required to be flat. The conventional rolling method of small-sized molybdenum plates is hydrogen protection heating and direct rolling. However, the billet weight required for large-sized molybdenum plat...

Claims

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Application Information

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IPC IPC(8): C23C14/34C22F1/18
Inventor 邓自南淡新国郭让民侯军涛李明强郭磊丁旭张清李辉吕利强马宏旺
Owner XIAN REFRA TUNGSTEN & MOLYBDENUM
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