Method for preparing large-size molybdenum plates for sputtering targets of liquid crystal display (LCD) flat-panel displays

Abstract

The invention discloses a method for preparing large-size molybdenum plates for sputtering targets of liquid crystal display (LCD) flat-panel displays, which comprises: 1), uniformly brushing an antioxidation coating on the surface of a molybdenum plate blank by pressing and sintering by the conventional process; 2), covering the molybdenum plate blank with the antioxidation coating with a steel capsule; 3), rolling the molybdenum plate blank covered with the steel capsule by one time of heating, and cooling the rolled molybdenum plate blank on a cold bed; 4), rolling the cooled molybdenum plate blank till the thickness (including the steel capsule) of the molybdenum plate blank is between 19 and 24 millimeters; 5), leveling the rolled molybdenum plate blank, removing the steel capsule, cutting the molybdenum plate blank and obtaining semi-finished molybdenum plates; and VI, performing the vacuum heat treatment of the semi-finished molybdenum plates, and obtaining the large-size molybdenum plates for the sputtering targets of the LCD flat-panel display. The large-size molybdenum plates for the sputtering targets of the LCD flat-panel display, which are prepared by the method of the invention, have flat surfaces, the density of the plates is more than or equal to 10.15g / cm<3>, the microscopic structure of the plates is uniform equiaxial structure, and the average grain size of the plates is not more than 200 mu m.

Description

technical field [0001] The invention belongs to the technical field of preparing molybdenum plates for sputtering targets, and in particular relates to a method for preparing large-size molybdenum plates for LCD flat panel display sputtering targets. Background technique [0002] Large-sized molybdenum plates with a thickness of 14mm-18mm, a width of 1000mm-1800mm, and a length of 1300mm-2200mm can be used to process sputtering targets for LCD flat panel displays of the 4.5th generation to 6th generation lines. This type of molybdenum plate has high technical requirements, and the density requirement is not less than 10.15g / cm 3 , The microstructure is required to be a uniform equiaxed grain structure, the average grain size does not exceed 200μm, and the board surface is required to be flat. The conventional rolling method of small-sized molybdenum plates is hydrogen protection heating and direct rolling. However, the billet weight required for large-sized molybdenum plat...

AI Technical Summary

Problems solved by technology

This method adopts the way of painting anti-oxidation coating and steel ladle cover, which solves the problem of oxidation in the process of heating and rolling, and the problem of serious temperature drop of the billet in the process of taking out the furnace and rolling, and at the same time reduces the rolling force of the molybdenum plate. The smooth progress of rolling is guaranteed; the total processing rate of the first fire rolling is controlled to 50% to 60% during the rolling process, and the rolled piece is placed on the cooling bed for rapid cooling after the first fire rolling is completed , can prevent the uneven growth and recrystallization of the microstructure after hot rolling, and obtain a processed structure with uniform deformation. The final prepared molybdenum plate has an equiaxed crystal structure with uniform size