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Coated member and preparation method thereof

A technology for coating parts and magnesium alloys, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of insufficient film compactness and inability to effectively delay the erosion of salt spray, so as to improve the resistance Corrosion performance, high hardness and wear resistance, effect of improving service life

Inactive Publication Date: 2012-08-01
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the vacuum coating (PVD) technology is a very environmentally friendly coating process, and there are many types of coatings that can be coated, and excellent wear resistance, the films deposited by the PVD process often grow in the form of columnar crystals, so there are a lot of coatings in the coating. Intergranular gaps, resulting in insufficient film density to effectively delay the erosion of salt spray

Method used

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  • Coated member and preparation method thereof
  • Coated member and preparation method thereof

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preparation example Construction

[0031] The preparation method of the coating member 10 of a preferred embodiment of the present invention, it comprises the following steps:

[0032] (a) A magnesium alloy substrate 11 is provided.

[0033] (b) Put the magnesium alloy substrate 11 into absolute ethanol for ultrasonic cleaning to remove stains on the surface of the magnesium alloy substrate 11, and the cleaning time may be 5-20 minutes.

[0034] (c) Perform argon plasma cleaning on the surface of the magnesium alloy substrate 11 after the above treatment to further remove the oil stain on the surface of the magnesium alloy substrate 11 and improve the bonding force between the surface of the magnesium alloy substrate 11 and the subsequent coating. combined reference figure 2 , provide a vacuum coating machine 20, the vacuum coating machine 20 includes a coating chamber 21 and a vacuum pump 30 connected to the coating chamber 21, the vacuum pump 30 is used to evacuate the coating chamber 21. The coating chamb...

Embodiment 1

[0041] The vacuum coating machine 20 used in this embodiment is an intermediate frequency magnetron sputtering coating machine.

[0042] Plasma cleaning: the argon gas flow rate is 500 sccm, the bias voltage of the magnesium alloy substrate 11 is -500V, and the plasma cleaning time is 5 minutes.

[0043] Magnesium layer 13 is sputtered: the flow rate of argon gas is 100 sccm, the power of the magnesium target 23 is 3kW, the bias voltage of the magnesium alloy substrate 11 is -100V, the coating temperature is 80°C, and the coating time is 10min; the thickness of the magnesium layer 13 is 20nm .

[0044] Sputtering magnesium oxynitride layer 15: the oxygen flow rate is 80 sccm, the nitrogen gas flow rate is 50 sccm, other process parameters are the same as those for depositing the magnesium layer 13, the coating time is 60 min, and the thickness of the magnesium oxynitride layer 15 is 200 nm.

[0045] Sputtering titanium nitride layer 17: the flow rate of nitrogen gas is 50 scc...

Embodiment 2

[0047] The vacuum coating machine 20 used in this embodiment is the same as that in Embodiment 1.

[0048] Plasma cleaning: the argon gas flow rate is 500 sccm, the bias voltage of the magnesium alloy substrate 11 is -500V, and the plasma cleaning time is 5 minutes.

[0049] Magnesium layer 13 is sputtered: the flow rate of argon gas is 300sccm, the power of magnesium target 23 is 10kW, the bias voltage of magnesium alloy substrate 11 is -300V, the coating temperature is 200°C, and the coating time is 30min; the thickness of the magnesium layer 13 is 50nm .

[0050] Sputtering magnesium oxynitride layer 15: the oxygen flow rate is 120 sccm, the nitrogen gas flow rate is 80 sccm, other process parameters are the same as those for depositing the magnesium layer 13, the coating time is 90 min, and the thickness of the magnesium oxynitride layer 15 is 300 nm.

[0051]Sputtering titanium nitride layer 17: the flow rate of nitrogen gas is 80 sccm, the flow rate of argon gas is 300 ...

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Abstract

The invention provides a coated member. The coated member comprises a magnesium alloy matrix, a magnesium coating layer formed on the surface of the magnesium alloy matrix, a magnesium oxynitride coating layer formed on the surface of the magnesium coating layer and a titanium nitride coating layer formed on the surface of the magnesium oxynitride coating layer. The coating layers of the coated member have good layer-by-layer transitivity and the adhesiveness between the coating layer and the magnesium alloy matrix is firm. The magnesium oxynitride coating layer is compact, can effectively delay an erosion effect of salt mist on the magnesium alloy matrix and further improves corrosion resistance of the magnesium alloy matrix. The titanium nitride coating layer can effectively prevent wearing and scraping of the magnesium oxynitride coating layer and effectively improve a service life of the coated member. In addition, the invention also provides a preparation method of the coated member.

Description

technical field [0001] The invention relates to a coating piece and a preparation method of the coating piece. Background technique [0002] Magnesium alloys have the advantages of light weight and good heat dissipation, and are widely used in communications, electronics, transportation, construction, aerospace and other fields. However, due to the high chemical activity of magnesium alloys, it is easy to oxidize in the air, forming a loose and poorly protective oxide film, which leads to severe corrosion on the surface of magnesium alloys in moisture containing electrolytes, such as the atmospheric environment on the surface of the ocean. , thus destroying the appearance of the magnesium alloy product and shortening the service life of the product. [0003] Salt spray corrosion resistance is an important parameter for the corrosion resistance of magnesium alloys. In order to improve the salt spray corrosion resistance of magnesium alloys, surface coating treatment is usual...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/345C23C14/0676C23C14/35C23C14/022Y10T428/12549Y10T428/265
Inventor 张新倍陈文荣蒋焕梧陈正士王莹莹
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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