Integrated chip of micro thermal conductive detector and manufacturing method for same

Abstract

The invention discloses an integrated chip of micro thermal conductive detector and a manufacturing method for the same. The chip comprises a silicon substrate and a glass substrate, micro thermistors, micro conductivity cells, micro channels, and micro temperature sensors. The manufacturing method comprises the steps of: forming the micro channels and micro conductivity cells on the silicon substrate and the glass substrate respectively, forming hanging support beams having a three-layer structure of silicon oxide-silicon nitride-diffusion silicon or a double-layer structure of silicon oxide-silicon nitride in the micro conductivity cells, forming micro thermal conductive detectors and the thermistors of the micro temperature sensors on the upper surface of the support beams by using thermo-sensitive materials such as Pt or PTC or NTC, and the like, forming gas sample inlet interface ports and outlet interface ports at two ends of the micro channels on the glass substrate, and aligning and bonding the silicon substrate and the glass substrate for sealing via the bonding technology to obtain the integrated chip of micro thermal conductive detector. The integrated chip of micro thermal conductive detector can be used for detecting harmful gas in the fields of submarine, mine, home security, air quality monitor, narcotic drugs detection, and cancer diagnosis.

Description

technical field [0001] The invention relates to the technical field of integrated chips, and relates to a micro-thermal conductivity detector integrated chip and a manufacturing method thereof. Based on MEMS technology, it is used for the detection of various mixed gases, and is widely used in submarine harmful gas detection, air quality monitoring, home safety, Detection of mine gas, food safety, drug detection and cancer prediction. Background technique [0002] Gas chromatography (GC) is an extremely effective separation method created by British biochemist Martin ATP et al. It can be used to analyze and detect complex multi-component gas mixtures. In the past 20 years, gas chromatography technology has achieved rapid development in terms of implementation, instrument development and application field expansion. [0003] In the gas detector, the thermal conductivity detector is a very important detector, and the thermal conductivity detector is mainly composed of a minia...

AI Technical Summary

Problems solved by technology

[0004] In the existing miniature thermal conductivity detectors, the miniature thermistors all use silicon nitride as the support beam, and when the thickness of the silicon nitride film reaches In the future, the stress in the membrane will be very large, which will lead to cracking, deformation and collapse of the membrane. Therefore, the micro-thermal conductivity detector of this silicon nitride support beam has poor structural strength, short service life, and is easily affected by airflow.

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