High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector based on black silicon and preparation method thereof

Abstract

The invention relates to a high-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector based on black silicon and a preparation method thereof. The high-performance MEMS thermopile infrared detector comprises a substrate, wherein the substrate is provided with a release barrier strip, a heat isolation cavity is arranged in the release barrier strip, a black silicon infrared absorption region is arranged above the heat isolation cavity, thermopiles are arranged on the outer side of the black silicon infrared absorption region, after the thermopiles on the outer side of the black silicon infrared absorption region are connected in series, the thermopiles are electrically connected to a whole body, and the thermopiles, which are connected in series, are provided with metal electrodes for outputting a detection result; the detection cold ends of the thermopiles are connected with the substrate through a first heat conduction and electric isolation structure, and a heat conductor is located on the outer side of a heat isolation cavity; and the detection heat ends of the thermopiles are in contact with the black silicon infrared absorption region through a second heat conduction and electric isolation structure. The high-performance MEMS thermopile infrared detector, provided by the invention, has the advantages of simple and easy implementation, convenience for monolithic integration, high response rate and detection rate, compatibility with a CMOS (Complementary Metal Oxide Semiconductor) process, wide application range, safety and reliable.

Description

technical field [0001] The invention relates to an infrared detector and a preparation method thereof, in particular to a black silicon-based high-performance MEMS pyroelectric infrared detector and a preparation method thereof, belonging to the technical field of MEMS infrared detectors. Background technique [0002] MEMS thermopile infrared detector is a typical device in the field of sensing and detection. It is one of the core components of sensing and detecting devices such as temperature sensors, root mean square converters, gas sensors, and thermal flow meters. At the same time, Small-sized thermopile infrared detectors can also be used to build infrared focal plane array (FPA) devices to achieve infrared imaging. Compared with infrared detectors based on other working principles (such as pyroelectric infrared detectors and thermistor infrared detectors, etc.), thermopile infrared detectors have measurable constant radiation, no need to add bias voltage, no need to ch...

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Problems solved by technology

However, black silicon still has the physical and chemical properties of silicon materials, so in the subsequent XeF 2 During the dry release process, it is easily damaged by corrosive gases; and because the nanostructures in black silicon have a certain height and high density, conventional methods, such as film deposition protection or glue coating protection, cannot achieve effective protection.

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