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Method for preparing large-size zinc-oxide based target by casting through novel low-toxicity gel

A zinc oxide-based, large-size technology is applied in the field of preparing large-size zinc oxide-based targets by new low-toxic gel casting, which can solve the problems of difficult molding, high production costs, and poor target uniformity, and achieve high quality, The effect of low equipment requirements and large target size

Inactive Publication Date: 2013-02-13
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] In order to solve the problems of high production cost of AZO and its derivative targets, large size is difficult to shape, poor target uniformity, etc., the present invention provides a simple and convenient process for quickly preparing large-size, high-quality AZO and its derivatives by pouring a new low-toxicity gel. Gel Casting Method for Derivative Targets

Method used

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  • Method for preparing large-size zinc-oxide based target by casting through novel low-toxicity gel
  • Method for preparing large-size zinc-oxide based target by casting through novel low-toxicity gel
  • Method for preparing large-size zinc-oxide based target by casting through novel low-toxicity gel

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preparation example Construction

[0028] a) Preparation of the premix solution, dissolving methacrylamide, N,N′-methylenebisacrylamide, and ammonium polyacrylate in water (preferably deionized water), stirring evenly to obtain a clear transparent liquid. The weight percentage of methacrylamide in the premix can be 1-20 wt%, preferably 10-20 wt%; the weight percentage of N,N'-methylenebisacrylamide can be 0.1-2 wt%, preferably 0.5 ~1.5wt%; the weight percentage of ammonium polyacrylate can be 0.1~10wt%, preferably 1~8wt%. The temperature of the premixed solution may be 5-60°C.

[0029] b) Weighing the required inorganic powder raw material according to the chemical composition of the desired target material, preferably high-purity (for example, purity greater than N) powder raw material, the powder raw material includes high-purity zinc oxide and at least one additional component, Additional components include aluminum oxide, gallium oxide, indium oxide, silicon oxide, aluminum powder, and / or indium nitrate. ...

Embodiment 1

[0039] Take 130g of deionized water, add 25g of methacrylamide, 13g of ammonium polyacrylate and 1.3g of N,N'-methylenebisacrylamide, and stir with high-speed magnetic force to obtain a uniform light yellow transparent solution, that is, the premix. Add to the ball mill jar. Weigh 980g of zinc oxide powder and 20g of alumina powder, mix them, add them to a ball mill tank in batches, and use alumina spheres to mill for 36 hours to fully infiltrate the powder with water to obtain a uniform and stable yellow slurry. Add 1ml of tetramethylethylenediamine (as a catalyst) and 3ml of ammonium persulfate (as an initiator) to the slurry, mix well and pour it into the mold quickly, let it stand to solidify, demould, and dry. The dried green body is degummed under a certain heating curve (the total degumming time is 21.5h, divided into 8 stages, and the maximum temperature is 900°C): the temperature is raised to 100°C at 2°C / min (heating rate), and the temperature is kept 1h, then heat ...

Embodiment 2

[0041] Take 390g of deionized water, add 75g of methacrylamide, 39g of ammonium polyacrylate solution, 1.3g of N,N'-methylenebisacrylamide, 4g of tetramethylethylenediamine and 9g of polyethylene glycol, and stir with a high-speed magnetic force , to obtain a uniform light yellow transparent solution. Weigh 3328g of zinc oxide and 72g of alumina powder, and ball mill for 48 hours to obtain a stable slurry. Ammonium persulfate is added to the slurry, stirred quickly and evenly, poured into a mold, solidified and dried to obtain a green body. The dried green body is degummed under a certain heating curve (the total degumming time is 21.5h, divided into 8 stages, and the maximum temperature is 900°C): the temperature is raised to 100°C at 2°C / min (heating rate), and the temperature is kept 1h, then heat up to 500°C at 1°C / min, hold for 1h, then heat up to 600°C at 1°C / min, hold for 1h, heat up to 900°C at 1°C / min, hold for 2h, and finally cool down at 1°C / min After reaching 750...

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Abstract

The invention relates to a method for preparing a large-size zinc-oxide based target by casting through a novel low-toxicity gel. The large-size zinc-oxide based target comprises the following chemical components: zinc-oxide and X, wherein the X is Al, Ga, In and / or Si. The method comprises the following steps: mixing a high-purity inorganic powder with a premixed solution by ball milling to obtain a stable slurry with high fluidity, wherein the premixed solution comprises methacrylamide, N, N' dimethylene bisacrylamide, ammonium polyacrylate and water; solidifying the stable slurry into the high-strength green compact at least under the action of an initiator; and drying, sizing and sintering the green compact to obtain the large-size zinc-oxide based target, wherein the sizing procedure is the high-temperature sizing procedure adopting multiple segments of temperature curves.

Description

technical field [0001] The invention relates to a method for preparing a large-size magnetron sputtering target with a novel low-toxicity gel system, which belongs to the technical field of functional materials and energy saving, and specifically relates to the preparation of high-quality, Large-size zinc oxide-based target (ZnO:X, X=Al, Ga, In, Si) process. Background technique [0002] The transparent front electrode is an important part of thin-film solar cells, which requires materials with high conductivity and light transmittance, and its performance directly affects the photoelectric conversion efficiency of the cell. The more commonly used transparent electrode materials include tin-doped indium oxide (ITO), fluorine-doped tin oxide (FTO), and aluminum-doped zinc oxide (AZO). [0003] Magnetron sputtering has the advantages of low cost, simple process, good film-forming quality, high film-forming rate, and mature process, so it is widely used in industrial productio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453C04B35/622
Inventor 黄富强龙胜崔厚磊曾毅
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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