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Preparation method of Ta (Tantalum) film on bearing steel surface

A technology of bearing steel and film, which is applied in the field of preparation of Ta-based film on the surface of bearing steel, can solve the problems of high-speed and heavy-load bearings, shallow depth, etc., and achieve the effects of improving hardness, reducing surface cracks and prolonging service life

Inactive Publication Date: 2013-03-20
SHANGHAI UNIV OF ENG SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the performance of bearing steel has been greatly improved after ion implantation, but the depth of ion implantation at room temperature is relatively shallow, which cannot meet the requirements of high-speed and heavy-duty bearings

Method used

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  • Preparation method of Ta (Tantalum) film on bearing steel surface
  • Preparation method of Ta (Tantalum) film on bearing steel surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] (1) Pretreatment of bearing steel surface:

[0025] GCr15 steel surface polishing and cleaning: The bearing steel used in this embodiment is GCr15 steel. First, the surface of the bearing steel is polished with metallographic sandpaper, and the metallographic sandpaper is sequentially used 200 ＃ 、600 ＃ 、1000 ＃ , 1500 ＃ , 2000 ＃ Sandpaper, and then mechanically polish to Ra≤0.1075μm with diamond abrasive paste as polishing agent, and finally place the polished workpieces in absolute ethanol and anhydrous acetone respectively and use ultrasonic cleaning for 10 minutes, and dry the surface for later use;

[0026] (2) Implantation of basic non-metallic ions

[0027] Put the pretreated bearing steel in a vacuum chamber, the vacuum degree of the back and bottom of the vacuum chamber is ≤2×10 -3 Below Pa, the air leakage rate of the vacuum chamber is ≤0.05Pa L / s; the surface of the workpiece is sputtered and cleaned by ions generated by argon ionization, the sputtering pr...

Embodiment 2

[0033] (1) The three steps of the pretreatment of the bearing steel surface, the implantation of basic non-metallic ions and the deposition of the metal Ta film are the same as in Example 1.

[0034] (2) Implantation of non-metallic ions in Ta-based thin films

[0035] Using high-purity CH 4 The gas was used as the plasma source, and carbon ions were implanted into the Ta film, the implantation voltage was 60kV, the implantation current was 10mA, and the implantation dose was 3×10 17 ions / cm 2 .

[0036]The prepared bearing steel was tested, and the test results showed that: the surface hardness of the bearing steel increased from 8.5GPa to 16GPa, an increase of 88%; the friction coefficient decreased from 0.8 to 0.2-0.3, specifically as figure 2 As shown; the wear rate has dropped by 65%; there is a certain thickness of diamond-like carbon film on the surface of the film, which greatly improves the hardness and wear resistance of the bearing steel.

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Abstract

The invention belongs to the technical field of surface film reinforcement, and in particular relates to a preparation method of a Ta (Tantalum) film on a bearing steel surface. The preparation method comprises the following steps: firstly the bearing steel surface is pre-treated, ground, polished, then subjected to ultrasonic cleaning in an organic solvent, and dried; then a work piece is subjected to the surface sputtering cleaning in a vacuum state, and the nonmetallic ion implantation is carried out on the surface of the work piece; a Ta surface is subjected to sputtering cleaning, and a Ta-based film is deposited on the surface of the work piece obtained from the above procedures; and at last the nonmetallic ion implantation is carried out on the Ta-based film. By adopting the preparation method, the obtained bearing steel is high in hardness and good in wear resistance, the rigidity of the bearing steel is at least improved by 80%, the wear rate is reduced by 65%, and the service life of the bearing steel is efficiently prolonged. In addition, no obvious interface exits between the prepared film and a base, the metallurgical bonding can be achieved, the bonding force can be improved, and simultaneously the rigidity of the work piece is improved.

Description

technical field [0001] The invention belongs to the technical field of surface film layer strengthening, and in particular relates to a preparation method of a Ta-based film on the surface of a bearing steel. Background technique [0002] Bearing steel is an important metallurgical product, mainly used in machinery manufacturing, railway transportation, automobile manufacturing, national defense industry and other fields. GCr15 steel is a commonly used high-carbon chromium bearing steel. Its excellent performance and low price make it widely used in the manufacture of various bearings whose operating temperature does not exceed 170 °C. Although GCr15 steel has high hardness, uniform structure, good wear resistance and high contact fatigue performance after quenching and tempering, with the advancement of science and technology, the performance requirements for bearings are also getting higher and higher. Prolonging the service life of bearings has always been an important r...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/48C23C14/02
Inventor 李忠文唐光泽马欣新
Owner SHANGHAI UNIV OF ENG SCI
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