Preparation method of Ta (Tantalum) film on bearing steel surface

A technology of bearing steel and film, which is applied in the field of preparation of Ta-based film on the surface of bearing steel, can solve the problems of high-speed and heavy-load bearings, shallow depth, etc., and achieve the effects of improving hardness, reducing surface cracks and prolonging service life

Inactive Publication Date: 2013-03-20
SHANGHAI UNIV OF ENG SCI
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Problems solved by technology

However, the performance of bearing steel has been greatly improved after ion implantation, but the depth of ion implant

Method used

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  • Preparation method of Ta (Tantalum) film on bearing steel surface
  • Preparation method of Ta (Tantalum) film on bearing steel surface

Examples

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[0023] Example 1

[0024] (1) Pretreatment of bearing steel surface:

[0025] Surface polishing and cleaning of GCr15 steel: The bearing steel used in this example is GCr15 steel. First, the surface of the bearing steel is polished and polished with metallographic sandpaper. # , 600 # , 1000 # , 1500 # , 2000 # Sandpaper, then use diamond abrasive paste as polishing agent to mechanically polish to Ra≤0.1075μm, and finally put the polished workpiece in absolute ethanol and anhydrous acetone and clean the surface by ultrasonic for 10 minutes, and dry the surface for use;

[0026] (2) Implantation of basic non-metal ions

[0027] Put the pre-treated bearing steel in a vacuum chamber, the vacuum degree of the back of the vacuum chamber ≤ 2×10 -3 Below Pa, the air leakage rate of the vacuum chamber is less than or equal to 0.05Pa·L / s; the surface of the workpiece is sputtered and cleaned by ions generated by argon ionization. The sputtering pressure is 0.2~0.3Pa, and the workpiece...

Example Embodiment

[0032] Example 2

[0033] (1) The three steps of pretreatment of bearing steel surface, implantation of basic non-metallic ions and deposition of metal Ta thin film are the same as in Example 1.

[0034] (2) Non-metallic ion implantation of Ta-based film

[0035] Use high purity CH 4 Gas is used as the plasma source to implant carbon ions into the Ta film. The injection voltage is 60kV, the injection current is 10mA, and the injection dose is 3×10. 17 ions / cm 2 .

[0036] The prepared bearing steel was tested. The test results showed that the surface hardness of the bearing steel increased from the original 8.5GPa to 16GPa, an increase of 88%; the friction coefficient decreased from the original 0.8 to 0.2~0.3, as detailed figure 2 As shown; the wear rate has dropped by 65%; a certain thickness of diamond-like carbon film exists on the surface of the film, which greatly improves the hardness and wear resistance of the bearing steel.

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Abstract

The invention belongs to the technical field of surface film reinforcement, and in particular relates to a preparation method of a Ta (Tantalum) film on a bearing steel surface. The preparation method comprises the following steps: firstly the bearing steel surface is pre-treated, ground, polished, then subjected to ultrasonic cleaning in an organic solvent, and dried; then a work piece is subjected to the surface sputtering cleaning in a vacuum state, and the nonmetallic ion implantation is carried out on the surface of the work piece; a Ta surface is subjected to sputtering cleaning, and a Ta-based film is deposited on the surface of the work piece obtained from the above procedures; and at last the nonmetallic ion implantation is carried out on the Ta-based film. By adopting the preparation method, the obtained bearing steel is high in hardness and good in wear resistance, the rigidity of the bearing steel is at least improved by 80%, the wear rate is reduced by 65%, and the service life of the bearing steel is efficiently prolonged. In addition, no obvious interface exits between the prepared film and a base, the metallurgical bonding can be achieved, the bonding force can be improved, and simultaneously the rigidity of the work piece is improved.

Description

technical field [0001] The invention belongs to the technical field of surface film layer strengthening, and in particular relates to a preparation method of a Ta-based film on the surface of a bearing steel. Background technique [0002] Bearing steel is an important metallurgical product, mainly used in machinery manufacturing, railway transportation, automobile manufacturing, national defense industry and other fields. GCr15 steel is a commonly used high-carbon chromium bearing steel. Its excellent performance and low price make it widely used in the manufacture of various bearings whose operating temperature does not exceed 170 °C. Although GCr15 steel has high hardness, uniform structure, good wear resistance and high contact fatigue performance after quenching and tempering, with the advancement of science and technology, the performance requirements for bearings are also getting higher and higher. Prolonging the service life of bearings has always been an important r...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/48C23C14/02
Inventor 李忠文唐光泽马欣新
Owner SHANGHAI UNIV OF ENG SCI
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