A method for coating the surface of an x-ray reflector

A technology of surface coating and mirror, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc., can solve the problems of interlayer roughness, large film mixing and diffusion, etc., and achieve the thickness of the film Ease of control, improved reflectivity, and strong adhesion

Active Publication Date: 2015-12-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to solve the problem of large interface roughness between film layers and the problem of mixing and diffusion between film layers in the existing method for coating the surface of X-ray reflectors, and proposes a method for coating the surface of X-ray reflectors

Method used

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Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0021] Specific embodiment one: the method for the surface coating of a kind of X-ray mirror in this embodiment is carried out according to the following steps:

[0022] 1. Clean the glass substrate with acetone ultrasonic wave for 15min-30min, then clean it with absolute ethanol for 15min-30min, and finally clean it with deionized water for 15min-30min and then dry it;

[0023] 2. Place the glass substrate on the rotating heating table in the magnetron sputtering vacuum chamber, so that the center of the substrate is facing the center of the titanium target, and the vacuum chamber is evacuated through the vacuum acquisition system. When the vacuum degree in the vacuum chamber reaches 1.0× 10 -4 Pa~9.9×10 -4 At Pa, start the heating device, heat to 25°C-650°C, and keep warm for 10min-120min; introduce Ar gas, and when the pressure in the vacuum chamber is 3Pa-5Pa, apply a negative voltage of 200V-800V to the rotating heating table, and the glass The substrate is splash clean...

specific Embodiment approach 2

[0035] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that in step 1, the glass substrate is ultrasonically cleaned with acetone for 20 minutes to 25 minutes, then cleaned with absolute ethanol for 20 minutes to 25 minutes, and finally cleaned with deionized water for 20 minutes to 25 minutes. drying. Other steps and parameters are the same as those in Embodiment 1.

specific Embodiment approach 3

[0036] Embodiment 3: This embodiment differs from Embodiment 1 in that in step 1, the glass substrate is ultrasonically cleaned with acetone for 24 minutes, then cleaned with absolute ethanol for 24 minutes, and finally cleaned with deionized water for 24 minutes and then dried. Other steps and parameters are the same as those in Embodiment 1.

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Abstract

The invention relates to a method for coating a film on a surface of an X-ray reflector, and the method can be used for solving the problems of high interface roughness between films and mixing and diffusion between the films in the prior art. The method comprises the following steps: 1, washing a glass base; 2, heating and keeping the glass base warm, and carrying out backwash cleaning on the surface of the glass base; 3, coating a titanium film on the surface of the glass base; 4, carrying out backwash spurting on the surface of the titanium film; 5, coating a carbon film on the surface of the titanium film; 6, carrying out backwash spurting on the surface of the carbon film; and 7, cutting off the power supply, cooling down to room temperature and finishing the film preparation on the surface of the X-ray. The method is applicable to the field of thin film engineering.

Description

technical field [0001] The invention relates to a method for coating the surface of an X-ray reflector. Background technique [0002] Inertial Confinement Fusion ICF (Inertial Confinement Fusion) uses a strong laser to bombard a miniature target pellet composed of thermonuclear fuel such as deuterium and tritium, so that the target pellet is ionized and a high-temperature plasma is formed around the target pellet. The plasma explodes outwards, generating huge centripetal pressure, causing the center to generate extremely high temperature and pressure, causing nuclear fusion reactions. In order to diagnose the internal high-temperature plasma, the X-ray emission of the plasma itself is used as the basis for diagnosis, which is the most commonly used method at present. Among them, the X-ray mirror is an important component of inertial confinement fusion X-ray spectrum diagnosis. [0003] The main method for coating the surface of X-ray mirrors is magnetron sputtering. The b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/18C23C14/02
Inventor 朱嘉琦刘星汪新智韩杰才
Owner HARBIN INST OF TECH
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