Titanium diboride-nickel thin film with coating structure and preparation method thereof

A titanium diboride and coating structure technology, applied in the coating structure TiB2-Ni film and its preparation, in the field of TiB2-Ni film, can solve the problems of limited improvement of material strength and hardness, achieve short preparation cycle, The effect of expanding the scope of application and convenient operation
CN103160777AActive Publication Date: 2013-06-19NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI

Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
Publication Date
2013-06-19

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Abstract

The invention relates to a titanium diboride-nickel thin film with coating structure. The TiB2-Ni thin film is characterized by being prepared from a continuous phase metal Ni and a dispersed phase TiB2 grains through in-situ synthesis. In the TiB2-Ni thin film, metal Ni in a three-dimensional continuous cellular structure uniformly form a basic framework of the thin film, and the TiB2 grains in granular shape uniformly fill in the cellular structure, so as to form a coating microstructure with metal Ni evenly coated with TiB2 grains; and the TiB2 accounts for 60- 95at.%, and Ni accounts for 5-40at.%. The TiB2-Ni thin film with coating structure provided by the invention shows good toughness and high hardness, so as to greatly expand the scope of application of the thin film. A double-target co-sputtering magnetron sputtering technology is easy to operate; composition, structure and performance of the TiB2-Ni thin film material can be well controlled through control of process conditions; and the method does not require a post-treatment process, has short preparation period, low cost and good reproducibility, and is easy to realize industrialized production.
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Description

technical field

[0001] The invention belongs to the field of new materials and relates to a TiB 2 -Ni film, specifically a cladding structure of TiB 2 -Ni thin film and its preparation method. Background technique

[0002] TiB 2 It has the advantages of high hardness, high melting point, low density, high Young's modulus, good thermal conductivity, electrical conductivity, wear resistance and chemical stability, etc. It is an advanced ceramic material with excellent structural and functional properties. Based on TiB 2 High hardness of the material, TiB 2 Particle-reinforced metal matrix composites have been extensively studied. For example: titanium diboride dispersion strengthened copper matrix composite (Chinese invention patent, 200910095176.9), TiB 2 Particle-reinforced magnesium-based composite materials (Chinese invention patent, 200710047943.X), etc. These materials have maintained the excellent properties of the metal matrix such as toughness, electrical conduc...

Claims

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