A kind of craln/zro2 nano-coating and preparation method thereof
A nano-coating and coating technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problem of hardness, high temperature oxidation resistance, production efficiency can not meet high-speed cutting and dry cutting, hardness, The anti-oxidation performance and deposition efficiency cannot be taken into account, so as to achieve the effects of excellent high-temperature oxidation resistance, low equipment requirements and low energy consumption
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[0026] Preparation, characterization and measuring instruments used in the present invention:
[0027] JGP-450 Magnetron Sputtering System, Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences
[0028] D / MAX 2550VB / PC X-ray diffractometer, Japan Rigaku Co., Ltd.
[0029] NANO Indenter G200 nanoindenter, Agilent Technologies, USA
[0030] Tecnai G 2 Model 20 high-resolution transmission electron microscope, FEI, USA
[0031] Quanta FEG450 scanning electron microscope, American FEI company
Embodiment 1
[0033] Ar gas flow is 32sccm, N 2 The gas flow rate is 10sccm; the total pressure is 0.2Pa; the CrAlN sputtering power is 120W, and the time is 10s; ZrO 2 The sputtering power is 80W, the time is 4s; the substrate temperature is 300°C.
[0034] The obtained CrAlN / ZrO 2 The schematic diagram of the structure of the nano-multilayer coating is shown in Fig. 1. After testing, the obtained CrAlN layer thickness is 5nm, ZrO 2 The thickness is 0.4nm, the total thickness is 1.9μm, the hardness is 42.1GPa, and the hardness is 33.4GPa after heating to 1000°C in air for 30min.
Embodiment 2
[0036] Ar gas flow is 40sccm, N 2 The gas flow is 15sccm; the total pressure is 0.3Pa; the CrAlN sputtering power is 120W, and the time is 10s; ZrO 2 The sputtering power is 80W, the time is 6s; the substrate temperature is 300°C.
[0037] After testing, the obtained CrAlN layer thickness is 5nm, ZrO 2 The thickness is 0.8nm, the total thickness is 2.2μm, the hardness is 44.6GPa, and the hardness is 34.8GPa after heating to 1000°C in air for 30min.
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