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A kind of craln/zro2 nano-coating and preparation method thereof

A nano-coating and coating technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problem of hardness, high temperature oxidation resistance, production efficiency can not meet high-speed cutting and dry cutting, hardness, The anti-oxidation performance and deposition efficiency cannot be taken into account, so as to achieve the effects of excellent high-temperature oxidation resistance, low equipment requirements and low energy consumption

Inactive Publication Date: 2015-09-16
UNIV OF SHANGHAI FOR SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, the above-mentioned existing coatings still have the problem that hardness, oxidation resistance and deposition efficiency cannot be balanced, and have shortcomings such as hardness, high temperature oxidation resistance, and production efficiency that cannot meet the performance requirements of high-speed cutting and dry cutting.

Method used

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  • A kind of craln/zro2 nano-coating and preparation method thereof
  • A kind of craln/zro2 nano-coating and preparation method thereof
  • A kind of craln/zro2 nano-coating and preparation method thereof

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preparation example Construction

[0026] Preparation, characterization and measuring instruments used in the present invention:

[0027] JGP-450 Magnetron Sputtering System, Shenyang Scientific Instrument Development Center Co., Ltd., Chinese Academy of Sciences

[0028] D / MAX 2550VB / PC X-ray diffractometer, Japan Rigaku Co., Ltd.

[0029] NANO Indenter G200 nanoindenter, Agilent Technologies, USA

[0030] Tecnai G 2 Model 20 high-resolution transmission electron microscope, FEI, USA

[0031] Quanta FEG450 scanning electron microscope, American FEI company

Embodiment 1

[0033] Ar gas flow is 32sccm, N 2 The gas flow rate is 10sccm; the total pressure is 0.2Pa; the CrAlN sputtering power is 120W, and the time is 10s; ZrO 2 The sputtering power is 80W, the time is 4s; the substrate temperature is 300°C.

[0034] The obtained CrAlN / ZrO 2 The schematic diagram of the structure of the nano-multilayer coating is shown in Fig. 1. After testing, the obtained CrAlN layer thickness is 5nm, ZrO 2 The thickness is 0.4nm, the total thickness is 1.9μm, the hardness is 42.1GPa, and the hardness is 33.4GPa after heating to 1000°C in air for 30min.

Embodiment 2

[0036] Ar gas flow is 40sccm, N 2 The gas flow is 15sccm; the total pressure is 0.3Pa; the CrAlN sputtering power is 120W, and the time is 10s; ZrO 2 The sputtering power is 80W, the time is 6s; the substrate temperature is 300°C.

[0037] After testing, the obtained CrAlN layer thickness is 5nm, ZrO 2 The thickness is 0.8nm, the total thickness is 2.2μm, the hardness is 44.6GPa, and the hardness is 34.8GPa after heating to 1000°C in air for 30min.

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Abstract

The invention discloses a CrAlN / ZrO2 nanometer multilayer coating and a preparation method thereof. The coating is composed of a plurality of CrAlN layers and ZrO2 layers, wherein the CrAlN layers and the ZrO2 layers are alternately deposited on a matrix, and the total thickness of the CrAlN layers and the ZrO2 layers is about 2-4 microns. The preparation method comprises the steps of: firstly, polishing the surface of the matrix, carrying out ultrasonic cleaning and ion cleaning on the matrix, and then, alternately sputtering the CrAlN layers and the ZrO2 layers on the matrix through a reactive sputtering method. The CrAlN / ZrO2 nanometer multilayer coating provided by the invention simultaneously has high hardness and high oxidation resistance, the maximum hardness of the CrAlN / ZrO2 nanometer multilayer coating can reach to 47.2GPa, the ZrO2 layers are inserted to block the outward diffusion of Cr and Al atoms and inward diffusion of O atoms, thereby improving the oxidation resistance of the coating, and the hardness of the coating can still maintain at 36.8GPa even if being heated to 1000 DEG C in the air and thermally insulated for 30minutes. Therefore, the coating can be used as protective coatings of high-speed cutting tools and other wearable workpieces working at high temperature, and the preparation method has the advantages of simple technique, high deposition speed, low cost, high bonding strength and the like.

Description

technical field [0001] The invention relates to a novel hard protective coating, in particular to a CrAlN / ZrO 2 The nanometer multi-layer coating and the preparation method thereof are mainly applied to the surface of dry and high-speed cutting tools, thereby improving the life of the tools. Background technique [0002] With the progress of society and the development of science and technology, higher and higher requirements are put forward for the surface properties of materials, which not only require high hardness, wear resistance and corrosion resistance, but also high temperature resistance. To meet the increasingly high engineering needs. Coating a layer of hard coating on the surface of the material is an economical and practical way to improve the surface properties of the material. As an important branch of the mechanical functional film, the hard coating is widely used in machining tools, especially in dominant in metal cutting. Hard coating can improve the sur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 李伟刘平赵永生马凤仓刘新宽陈小红何代华王鹏赵衍刚
Owner UNIV OF SHANGHAI FOR SCI & TECH