Ammonia purification system

A refining system and crude ammonia technology, applied in the field of ammonia refining system, can solve the problem of semiconductor function reduction and achieve the effect of suppressing energy consumption

Inactive Publication Date: 2014-03-05
SUMITOMO SEIKA CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, when ammonia contains a large amount of water, the functions of semiconductors and the like manufactured using this ammonia may be significantly reduced, so it is necessary to reduce the amount of water in ammonia as much as possible.

Method used

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Examples

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Embodiment Construction

[0038] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0039] figure 1 It is a figure which shows the structure of the ammonia purification system 100 which concerns on 1st Embodiment of this invention. The ammonia purification system 100 of the present embodiment is a system for refining liquid crude ammonia containing impurities. The ammonia purification system 100 includes a raw material storage tank 1 as a storage part, a control unit 2 as a derivation control part, a vaporizer 3 as a gasification part, an adsorption unit 4 as an adsorption part, and a condenser 5 as a partial condensation part. , And recovery tank 61 and constitute.

[0040] The raw material storage tank 1 is a container for storing crude ammonia. In this embodiment, the crude ammonia stored in the raw material storage container 1 has a purity of 99% by weight or more, preferably a purity of 99.0 to 99.9% by weight.

[004...

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PUM

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Abstract

Provided is an ammonia purification system which can prevent large variations in purity of the final refined ammonia. In this ammonia purification system (100), a control unit (2) controls a raw material storage tank (1) such that if, in the raw material storage tank (1), the volume ratio of the liquid phase to the total volume of the internal space is greater than or equal to a preset threshold value, then crude ammonia is delivered from the liquid phase, and if said volume ratio is less than said threshold value, then the crude ammonia is delivered from the gas phase. Further, an adsorption unit (4) delivers either the gaseous crude ammonia taken from the gas phase of the raw material storage tank (1), or the gaseous ammonia obtained by adsorbing with an adsorbent and removing impurities contained in the gaseous ammonia delivered from a vaporizer (3).

Description

technical field [0001] The invention relates to an ammonia refining system for refining crude ammonia. Background technique [0002] In the semiconductor manufacturing process and the liquid crystal manufacturing process, high-purity ammonia is used as a processing agent used in the formation of the nitride coating film and the like. Such high-purity ammonia is obtained by refining crude ammonia to remove impurities. [0003] Crude ammonia contains hydrogen, nitrogen, oxygen, argon, carbon monoxide, carbon dioxide and other low-boiling gases, organic compounds such as hydrocarbons, moisture, and the like as impurities, and the purity of crude ammonia generally available is about 98 to 99% by weight. [0004] Organic compounds such as hydrocarbons contained in crude ammonia are usually mainly hydrocarbons with 1 to 4 carbon atoms. When producing hydrogen gas used as a synthetic raw material for ammonia, if the separation of oil in the cracked gas is insufficient, or when pro...

Claims

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Application Information

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IPC IPC(8): C01C1/02
CPCB01J20/08B01J20/18B01J20/20B01J20/3408B01J20/3433B01J20/28052B01J2220/606C01C1/024B01J20/3416B01J2220/603B01J20/3483B01J20/103C01C1/02B01D53/002B01D53/04B01D2259/403B01D2259/4146Y02P20/50
Inventor 田井慎一森本茂津野修司
Owner SUMITOMO SEIKA CHEM CO LTD
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