Relaxation ferroelectric monocrystal pyroelectric infrared detector and preparation method thereof

A relaxor ferroelectric single crystal and pyroelectric infrared technology, applied in the infrared field, can solve problems such as difficult implementation and fixed area, and achieve the effects of effective control, high Curie temperature, and high detection rate

Inactive Publication Date: 2014-07-23
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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Problems solved by technology

In addition, the sensitive element of the traditional pyroelectric infrared detector is generally a full electrode with a fixed area. It is not easy to reduce the ele...

Method used

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  • Relaxation ferroelectric monocrystal pyroelectric infrared detector and preparation method thereof
  • Relaxation ferroelectric monocrystal pyroelectric infrared detector and preparation method thereof
  • Relaxation ferroelectric monocrystal pyroelectric infrared detector and preparation method thereof

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Embodiment 1

[0058] The method of Patent Document 1 (improved Bridgman method) was used to grow a large-size and high-performance relaxor ferroelectric single crystal, that is, a Mn-doped PMNT single crystal, and then the single crystal was oriented, cut, post-treated, and tested for performance. A series of technological processes select single crystals with excellent performance for further processing. Using chemical mechanical thinning and polishing, the large size 20×20mm 2 The wafer is thinned and polished to 20μm, and then the extremely thin single crystal is diced into 2.5×2.5mm using a dicing machine 2 To prepare the sensitive element of the pyroelectric infrared detector.

[0059] After the single crystal is diced, magnetron sputtering is used to sputter and deposit, for example, Ni-Cr electrodes and Ni-Cr / Au electrodes on its upper and lower surfaces as upper and lower electrodes. The electrode size can be divided into φ2.5mm and φ2. There are four types of .0mm, φ1.0mm and φ0.5mm, ...

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Abstract

The invention provides a relaxation ferroelectric monocrystal pyroelectric infrared detector and a preparation method thereof. The detector comprises a base, a shell, a sensing element, an upper electrode, a lower electrode, an absorbing layer and a current mode circuit, wherein the base is provided with pins, and the shell provided with a window and the base are packaged to form a holding space; the sensing element is arranged in the holding space and is made from relaxation ferroelectric monocrystal, and the thickness of the sensing elemtn is below 20 [mu] m; an upper electrode and a lower electrode are respectively arranged on the upper surface and the lower surface of the flexible element, the absorbing layer covers the upper electrode of the flexible element, and the current mode circuit is connected with the flexible element. The detector provided by the invention is high in response ratio, low in noise and high in detection ratio.

Description

Technical field [0001] The invention is an infrared technology field, which involves a hot -ended infrared detector and its preparation method. Background technique [0002] Today, countries around the world are competing to develop infrared detection and imaging technology, which are used in many fields such as military, aerospace, scientific research, medical care, and industry.Infrared detectors are mainly divided into two categories: photon infrared detector and hot infrared detector.At present, the common photon infrared detectors mainly use narrow control band semiconductor materials represented by cadmium mercury and photoelectronic semiconductor materials represented by gallium arsenidium.However, semiconductor infrared devices generally require low temperature and cold work, with large volume, high cost, and large power consumption. [0003] The hot -terminal infrared detector developed using the material thermal release effect has a flat spectral response in the ultravi...

Claims

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Application Information

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IPC IPC(8): H01L37/02
CPCC30B29/30C30B29/32H10N15/10
Inventor 罗豪甦李龙赵祥永许晴杨林荣狄文宁徐海清王升李晓兵林迪任博焦杰王西安
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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