Method for manufacturing low-power dissipation avalanche thyristor chip through open pipe daubing resource perfect diffusion

Abstract

The invention relates to a method for manufacturing a low-power dissipation avalanche thyristor chip through open pipe daubing resource perfect diffusion. The method comprises the steps of (1) technological environment preparation, (2) ultrasonic cleaning, (3) silicon wafer cleaning, (4) quartz frame and quartz lead cleaning, (5) silicon wafer boron-aluminum diffusion, (6) oxidation, (7) primary photoetching, (8) phosphorus diffusion, (9) circle cutting, (10) sintering, (11) secondary photoetching and evaporation once forming, (12) alloying, (13) table face processing, and (14) testing. Compared with the prior art, the method has the advantages that boron-aluminum primary diffusion is adopted, so that PN junction leading edge smoothness and product uniformity are ensured; the secondary photoetching and evaporation once forming technology is adopted, the working procedures are simplified, the physical damage is reduced, and the rate of finished products and the product performance reliability are improved; operation is carried out in the ultra-clean technological environment, and the long minority carrier lifetime is ensured due to a special cleaning way and a high-quality cleaning reagent; it is ensured that sintering deformation is small due to the novel sintering technology, bonding is firm, and it is ensured that diffusion parameters are stable and unchangeable.

Description

technical field

[0001] The invention relates to the technical field of power electronic device manufacturing, in particular to a process for manufacturing low-power avalanche thyristor chips for electric vehicles using an open-tube coated source full-diffusion method. Background technique

[0002] At present, domestic and international electric vehicles are in a period of rapid development, and electric vehicles generally use thyristors as electronic switch control power and drive motors, and output variable voltage and current according to the working state of the motor to drive electric vehicles. The thyristors used in domestic automobiles are generally produced by welding technology, which has a short service life and high failure rate. The low-power avalanche thyristor crimping chip is produced by a new open-tube coated source full-diffusion process, which has low cost and strong voltage and current shock resistance. The quality is reliable, and the cost is low, the prof...

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