A Diode Sputtering Coating Equipment for Coating the Inner Wall of a Vacuum Cup

Abstract

The invention discloses diode sputtering coating equipment used for coating the inner wall of a vacuum cup. The diode sputtering coating equipment comprises a support, a sputtering coating device and a vacuum device, wherein the sputtering coating device is arranged on the support, the vacuum device is connected with one end of the sputtering coating device, and a plurality of cup tools are arranged in the sputtering coating device and can be matched with different sputtering electrodes. The diode sputtering coating equipment has the benefits that the diode sputtering coating equipment is suitable for vacuum cups in different sizes and shapes and is simple in structure, easy to maintain and good in continuity; multiple workpieces can be machined in the same parameter, the production efficiency is high, and the quality consistence of coatings is good; additionally, due to the fact that the sputter electrodes can be replaced freely, the deposition temperature and other key parameters can be adjusted at will, and the quality and the components of the coatings can be adjusted; besides, once a more developed anti-bacteria coating is developed in the future, the equipment is very favorable for updating of the novel anti-bacteria coating and quick building of industrialization.

Description

technical field [0001] The invention relates to a two-pole sputtering coating device for coating the inner wall of a vacuum cup, which is applicable to vacuum cups with various sizes and shapes of the inner wall. Background technique [0002] With the development of society, vacuum cups have entered thousands of households, and the models and categories on the market are becoming more and more abundant. The main function of the vacuum cup is heat insulation. Its principle is to seal a vacuum interlayer with a certain degree of vacuum between the inner and outer layers of structural materials, and then supplement it with a sealed top cover to achieve the purpose of reducing internal and external heat exchange. With the advancement of technology, the traditional vacuum cup with tail has been replaced by the vacuum cup without tail. Using high-temperature fusion sealing technology to operate numerical control in a large vacuum chamber, it can be sealed in the stainless steel li...

AI Technical Summary

Problems solved by technology

However, the existing coating equipment on the market has certain defects and technical bottlenecks in coating the inner wall of the vacuum cup

For example, the electroplating method, especially the electroplating of heavy metals such as copper and silver, will cause serious environmental pollution and resource and energy consumption; general PVD (physical vapor deposition) vacuum coatings such as vacuum evaporation, magnetron sputtering and multi-arc ion plating are difficult to achieve. The uniform coating of the deep or complex inner wall can not even be completely covered, and the different positions of the workpiece will cause a huge difference in the quality of the coating; although CVD (chemical vapor deposition) can achieve uniform coating, the silver and copper gas source is expensive. High production cost, unable to form industrialization

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