Process for producing layered product, layered product, process for producing layered product with device using said layered product, and layered product with device
By adding lubricant and patterning treatment to the polyimide film, combined with coupling agent and organic alkali treatment, the problems of surface smoothness and dimensional stability when the polyimide film is bonded to the inorganic substrate are solved, achieving It achieves efficient device manufacturing under high temperature conditions and improves the performance and production efficiency of semiconductor components.
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[0188] Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated more concretely, this invention is not limited to the following Example. In addition, the evaluation methods of the physical properties in the following examples are as follows.
[0189] 1. Reduced viscosity (ηsp / C) of polyamic acid
[0190] Ubbelohde-type viscometer tube (Ubbelohde-type viscometer tube) at 30 ° C to the concentration of polymer dissolved in N-methyl-2-pyrrolidone (or N, N-dimethylacetamide) to 0.2 g / dl solution was measured. (When the solvent used in the preparation of the polyamic acid solution is N,N-dimethylacetamide, use N,N-dimethylacetamide to dissolve the polymer and perform the measurement.)
[0191] 2. Solution viscosity of polyamic acid solution
[0192] Measurement was carried out at 25° C. using a Brookfield viscometer.
[0193] 3. Thickness of polyimide film etc.
[0194] Measurement was performed using a micrometer (Millitron 1245D...
manufacture example 1～3
[0241] (Preparation of polyamic acid solution A)
[0242] After nitrogen replacement in the reaction vessel equipped with a nitrogen gas inlet tube, a thermometer, and a stirring rod, 223 parts by mass of 5-amino-2-(p-aminophenyl)benzoxazole and 4416 parts by mass of N,N-dimethylacetamide were added. After completely dissolving it, add 217 parts by mass of pyromellitic dianhydride and SNOWTEX (DMAC-ST30, Nissan Chemical Industry Co., Ltd. ), made the amount of silicon dioxide described in Table 1, and stirred at a reaction temperature of 25°C for 24 hours to obtain brown and viscous polyamic acid solutions A1 to A3. The measurement results are described in Table 1 and Table 2.
manufacture example 4～6
[0244] (Preparation of polyamic acid solution B)
[0245] After replacing nitrogen in the reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirring rod, 398 parts by mass of 3,3',4,4'-biphenyltetracarboxylic dianhydride as tetracarboxylic dianhydride, terephthalic dianhydride, and 147 parts by mass of amines were dissolved in 4600 parts by mass of N,N-dimethylacetamide, and reacted in the same manner while keeping the temperature at 20° C. or lower to obtain polyamic acid solutions B1 to B3. The measurement results are described in Table 1 and Table 2.
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