Multistage graphite heating system of sapphire crystal growth equipment and using method of multistage graphite heating system
A sapphire crystal and graphite heating technology, which is applied in crystal growth, single crystal growth, single crystal growth, etc., can solve the problems of growing large-sized sapphire crystals, shortening the service life of heaters, and high production costs. Uniform heating effect, improved quality and utilization rate, excellent quality effect
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[0040] In order to make the measures, creative features, goals and effects achieved by the technology of the present invention easy to understand, the present invention will be further described below in conjunction with specific illustrations.
[0041] figure 1 It is a schematic diagram of the composition and structure of the multi-stage graphite heating system of the sapphire crystal growth equipment of the present invention.
[0042] like figure 1 As shown, the multi-stage graphite heating system of sapphire crystal growth equipment, the multi-stage graphite heating system of sapphire crystal growth equipment, including: upper heater 1, middle heater 2, bottom heater 3, power supply unit, growth chamber body, crucible device and insulation layer 8; growth furnace cavity, including: small furnace cover 5, large furnace cover 6, furnace tube 7 and furnace chassis 14, and furnace tube 7 has upper and lower openings, and large furnace cover 6 is a circle The ring structure is...
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