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AlB2 type WB2 hard coating and preparation technology thereof

A technology of hard coating and preparation process, which is applied in the field of depositing hard wear-resistant coating on the surface of metal materials, which can solve the problem of less film/coating, achieve good friction and wear performance, and prolong the service life

Inactive Publication Date: 2015-04-15
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the research on transition metal borides is mostly focused on high temperature and high pressure bulk synthesis, but less research on thin film / coating preparation

Method used

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  • AlB2 type WB2 hard coating and preparation technology thereof
  • AlB2 type WB2 hard coating and preparation technology thereof
  • AlB2 type WB2 hard coating and preparation technology thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0023] The base material is high-speed steel (grade W18Cr4V), and the sample size is 270mm×70mm×7mm. The surface before coating is ground, polished, ultrasonically cleaned and dried, and then placed on the sample stage of the vacuum chamber until the vacuum degree in the vacuum chamber reaches 5×10 -3 At Pa, turn on the gas mass flow controller, pass argon to 2.0Pa, add the substrate bias to -180V, and perform glow cleaning on the sample for 15 minutes. After that, enter the thin film deposition process, the specific process parameters are: the target base distance is 50mm, the set air pressure is 0.3Pa, the target voltage is 360V, the current is 0.5A, the substrate bias is -180V, the duty cycle is 30%, and the deposition temperature is 680°C , with a total deposition time of 120 min. After the deposition is completed, quickly reduce the bias voltage, turn off the power switch of the sputtering target, stop the gas, continue to vacuumize, and when the furnace cools until the ...

Embodiment 2

[0029] The base material is cemented carbide (grade YG6), and the sample size is 20mm×20mm×3mm. The surface before coating is ground, polished, ultrasonically cleaned and dried, and then placed on the sample stage of the vacuum chamber until the vacuum degree in the vacuum chamber reaches 5×10 -3 At Pa, turn on the gas mass flow controller, pass argon to 0.8Pa, add the substrate bias to -180V, and perform glow cleaning on the sample for 10 minutes. After that, the thin film deposition process is entered. The specific process parameters are: the target base distance is 70mm, the set air pressure is 0.5Pa, the target voltage is 380V, the current is 0.8A, the substrate bias is -50V, the duty cycle is 25%, and the deposition temperature is 400°C. °C, and the total deposition time was 80 minutes. After the deposition is completed, quickly reduce the bias voltage, turn off the power switch of the sputtering target, stop the gas, continue to vacuumize, and when the furnace cools unt...

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Abstract

The invention discloses an AlB2 type WB2 hard coating and a preparation technology thereof, and belongs to the technical field of depositing a hard and wear-resistant coating on the surface of a metal material. Through regulating and controlling the coating composition, the deposition temperature, and substrate bias voltage, and adopting a direct current (DC) magnetron sputtering method, a WB2 (AlB2 type) hard and wear-resistant coating can be successfully formed on a high-speed steel or hard alloy substrate. The formed coating has the advantages of high microscopic hardness, low average friction coefficient, and low wear rate. The WB2 (AlB2 type) hard coating is successfully synthesized, thus the hardness and wear-resistant performance of the surfaces of cutters or tools are both prominently improved, and the coating also has an important meaning for theory research and practical application of superhard boride coatings.

Description

Technical field: [0001] The invention belongs to the technical field of depositing hard and wear-resistant coatings on the surface of metal materials, in particular to an AlB 2 Type WB 2 Hard coating and its preparation process. Background technique: [0002] Superhard materials are widely used in cutting processing industry, mold industry, geological drilling and aerospace and other fields. However, with the rapid development of modern industry, there are more and more difficult-to-machine materials, making some traditional tool materials unable to meet the increasingly complex cutting performance requirements. Diamond remains the hardest material known in nature. However, diamond also has limitations in use, and it is prone to chemical reactions and rapid wear when cutting metals. On the contrary, cubic boron nitride, the second hardest material currently known, with a structure similar to diamond, has higher thermal stability and chemical inertness, and can be used fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/067C23C14/35
Inventor 裴志亮蒋春磊刘艳明华伟刚刘山川赵明杨文进高超祖亚培陈育秋宫骏孙超
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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