Preparation method of auto-polymerizable nonsaturated ester with adamantane structure

Abstract

The invention relates to a preparation method of auto-polymerizable nonsaturated ester with an adamantane structure. The preparation method of the monomer comprises the following steps: simultaneously adding 4-hydroxy-4'-carboxyl-benzophenone and tertiary amine into an organic solvent and stirring, dissolving adamantyl acyl chloride in the organic solvent to obtain an acyl chloride organic solution, dropwise adding the acyl chloride organic solution into a three-necked flask within 3 hours, continuously stirring a reaction solution for 5 hours after adding dropwise and reacting at the reaction temperature of 0-5 DEG C, carrying out aftertreatment on the above solution, slowly adding a nonsaturated alcoholic solution into the treated solution, and washing with an acid solution so as to obtain the auto-polymerizable nonsaturated ester monomer with the adamantane structure. The product has both an adamantane structure and a benzophenone structure. Corrosion resistance of the product is enhanced, and the product also can automatically carry out photopolymerization.

Description

technical field [0001] The invention belongs to the field of photosensitive polymer materials, and in particular relates to a preparation method of self-polymerizable unsaturated ester with adamantane structure. Background technique [0002] Photoresist is a key chemical material in the microfabrication technology of integrated circuits. Photoresist, also known as photoresist, is a light-sensitive mixed liquid composed of three main components: photosensitive resin, sensitizer and solvent. After the photosensitive resin is exposed to light, the photocuring reaction can quickly occur in the exposed area, so that the physical properties of the material, especially the solubility and affinity, will change significantly. After being treated with an appropriate solvent, the soluble part is dissolved to obtain the desired image. According to its chemical reaction mechanism and development principle, it can be divided into two types: negative gel and positive gel. The imaging re...

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Problems solved by technology

[0005] The above methods have the following disadvantages: 1. There are many reaction steps, which easily produce by-products, and as a result, the yield of the target ester is significantly reduced; Can lead to decomposition of the adamantyl ester formed, reducing the yield

3. In the absence of any other additives, when adamantanol, a tertiary alcohol, is used as a raw material, the dehydration reaction of the alcohol occurs preferentially, so that the yield of the product adamantyl ester is significantly reduced

4. The experimental conditions are cumbersome and difficult to control, which is not conducive to large-scale production

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