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TiN/Ti/Si/Ti multi-layer wear-resistant corrosion-resistant thin film material and preparation method thereof

A corrosion-resistant film and film material technology, applied in metal material coating process, coating, ion implantation plating and other directions, can solve the problems of surface TiN film peeling, TiN film application limitation, abnormal wear of moving parts, etc. Corrosion resistance and protection performance, overcoming the limitation of applicable environment and applicable matrix materials, and improving the effect of bearing capacity

Active Publication Date: 2015-05-20
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, when the matrix material is carbon steel and alloy steel that are prone to rust, the corrosive medium in the application environment will invade the matrix material through the path formed by the above-mentioned structural defects, causing it to rust, and severe corrosion will cause The TiN film on the surface falls off, causing early failure of related moving parts due to abnormal wear
Therefore, the application of traditional TiN thin films is limited for metal substrate materials that are susceptible to corrosion and harsh application environments such as salt spray, high temperature and high humidity.

Method used

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  • TiN/Ti/Si/Ti multi-layer wear-resistant corrosion-resistant thin film material and preparation method thereof
  • TiN/Ti/Si/Ti multi-layer wear-resistant corrosion-resistant thin film material and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Choose 45 steel as the base material.

[0040] Step 1. Target preparation and installation

[0041] 1) Preparation of Ti target: process the Ti ingot into a cylindrical target with a diameter of Φ80mm and a thickness of 5mm;

[0042] 2) Preparation of polycrystalline Si target: the Si material is directly molded into a cylindrical target with a thickness of Φ80mm and a thickness of 5mm;

[0043] 3) Install the Ti target and the polycrystalline Si target on the target base of the magnetron sputtering coating device respectively, and connect the magnetron sputtering power supply respectively;

[0044] Step 2. Install and prepare coating base material

[0045] Put the clean 45 steel base material to be coated into the coating vacuum chamber, and adjust the target distance between the coating surface of the base material and the Ti and Si targets to 70mm;

[0046] Step 3, ion bombardment treatment

[0047] Vacuum the coating vacuum chamber to the background pressure of ...

Embodiment 2

[0057] Choose 40Cr steel as the base material.

[0058] Step 1. Target preparation and installation

[0059] 1) Preparation of Ti target: process the Ti ingot into a cylindrical target with a diameter of Φ80mm and a thickness of 4mm;

[0060] 2) Preparation of polycrystalline Si target: the Si material is directly molded into a cylindrical target with a thickness of Φ80mm and a thickness of 4mm;

[0061] 3) Install the Ti target and the polycrystalline Si target on the target base of the magnetron sputtering coating device respectively, and connect the magnetron sputtering power supply respectively;

[0062] Step 2. Install and prepare coating base material

[0063] Put the clean 40Cr steel base material to be coated into the coating vacuum chamber, and adjust the target distance between the coating surface of the base material and the Ti and Si targets to 80mm;

[0064] Step 3, ion bombardment treatment

[0065] Vacuum the coating vacuum chamber to the background pressure...

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Abstract

The invention discloses a TiN / Ti / Si / Ti multi-layer wear-resistant corrosion-resistant thin film material and a preparation method thereof. A thin film has a 4-layer structure, and from the surface of a substrate material to the surface of the multi-layer thin film, the multi-layer thin film is successively composed of a Ti layer, an amorphous Si layer, a dense Ti layer and a TiN layer. The thin film simultaneously has the hardness of more than 10 GPa and good corrosion-resistant and protection performance. Through addition of the amorphous Si layer and the dense Ti layer, formation of needle holes, micro-cracks and other structural defects penetrating through the multi-layer thin film is avoided, and the shortcomings of poor corrosion-resistant and protection performance of a traditional TiN thin film are better solved. The multi-layer thin film is suitable for wear resistance, corrosion resistance and protection of the surface of the substrate material easy to rust. At the same time, the thin film is also suitable for use in salt fog, high temperature and high humidity and other environmental conditions easily causing corrosion infringement.

Description

technical field [0001] The invention relates to a TiN / Ti / Si / Ti multilayer wear-resistant and corrosion-resistant integrated film material and a preparation method thereof. Background technique [0002] As we all know, the transition metal nitride film represented by TiN has high hardness and chemical inertness, and it is widely used in the anti-wear protection of the surface of tools, molds and knives in civil industry and the surface decoration protection of a large number of metal parts. In addition, TiN thin films have also been widely used on the surface of moving parts in high-tech fields such as aerospace and nuclear industry. The purpose of service efficiency and work reliability. At present, such thin films are mainly prepared by physical vapor deposition. Physical vapor deposition TiN thin films generally have structural defects such as pinholes and microcracks. Therefore, when the matrix material is carbon steel and alloy steel that are prone to rust, the co...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/16
Inventor 王德生胡明杨军刘维民翁立军孙嘉奕伏彦龙高晓明姜栋
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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