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Manufacturing method of molybdenum tube target

A manufacturing method and target technology, which are applied in the field of magnetron sputtering and molybdenum tube target manufacturing, can solve the problems of limiting the size of molybdenum extrusion billet, low material utilization rate, long process flow, etc., and achieve a long finished product length. , the effect of reducing energy consumption and simple process

Active Publication Date: 2017-06-27
ADVANCED TECHNOLOGY & MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that the process flow is long, there will be material loss during forging, machining is still required after forging and before extrusion, and the material utilization rate is low; because molybdenum has a body-centered cubic structure, its plasticity is poor, and it is easy to crack during forging; The process also limits the size of the molybdenum extrusion

Method used

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  • Manufacturing method of molybdenum tube target
  • Manufacturing method of molybdenum tube target
  • Manufacturing method of molybdenum tube target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] The specifications of the finished molybdenum tube target material (ie hollow cylindrical target material) prepared in this example are: the diameter of the outer circle / inner hole is 155 / 125 mm; the length is 6000 mm.

[0028] The specific preparation method is as follows:

[0029] (1) Preparation of molybdenum ingot: use Mo-1 powder with 3 μm and 99.98% purity as raw material, and load the powder

[0030] Afterwards, cold isostatic pressing at 220MPa, and after shaping, keep hydrogen at 2400°C for 12 hours

[0031] For sintering, the hydrogen flow rate is 4m 3 / h, after cooling out of the furnace, the diameter of the outer circle / inner hole is

[0032] 305 / 127mm, molybdenum tube blank with a length of 1010mm.

[0033] (2) One-time machining: According to the extrusion requirements, the above-mentioned molybdenum ingot sintered by powder is machined into a cylindrical ingot with the following inner hole and outer circle. The diameter of the outer circle / inner hole o...

Embodiment 2

[0039] The specifications of the finished molybdenum tube target (that is, the hollow cylindrical target) prepared in this example are: the diameter of the outer circle / inner hole is 73 / 60mm; the length is 1000mm

[0040] The specific preparation method is as follows:

[0041] (1) Preparation of molybdenum ingots: use 2.5μm Mo-1 powder with a purity of 99.98% as the raw material, after loading the powder

[0042] Cold isostatic pressing at 250MPa, after shaping, keep hydrogen at 2300°C for 10 hours

[0043] Line sintering, hydrogen flow rate is 3m 3 / h, after cooling out of the furnace, the diameter of the outer circle / inner hole is 125 / 57mm,

[0044] Molybdenum ingots with a length of 410mm.

[0045] (2) One-time machining: According to the extrusion requirements, the molybdenum ingot sintered by the above powder is machined into a cylindrical ingot with the following inner hole and outer circle. The diameter of the outer circle / inner hole of the ingot is 120 / 60mm, The le...

Embodiment 3

[0051] The specifications of the finished molybdenum tube target (that is, the hollow cylindrical target) prepared in this example are: the diameter of the outer circle / inner hole is 160 / 133mm; the length is 5000mm

[0052] The specific preparation method is as follows:

[0053] (1) Preparation of molybdenum ingots: use 3.5μm Mo-1 powder with a purity of 99.98% as the raw material, after loading the powder

[0054] Cold isostatic pressing at 240MPa, after shaping, heat at 2350°C for 11 hours with hydrogen

[0055] Line sintering, hydrogen flow rate is 3.5m 3 / h, after cooling out of the furnace, the diameter of the outer circle / inner hole is

[0056] 305 / 135mm, molybdenum ingot with a length of 610mm.

[0057] (2) One-time machining: According to the extrusion requirements, the powder sintered molybdenum ingot is machined into a cylindrical ingot with the following inner hole and outer circle. The diameter of the outer circle / inner hole of the ingot is 300 / 225mm, and the le...

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Abstract

The invention discloses a manufacturing method of a molybdenum target tube material. The method is that molybdenum powder is used as the raw material. The method comprises the steps of preparing a molybdenum ingot; mechanically processing for the first time; extruding; thermally processing; mechanically processing for the second time to obtain the final product. The method has the advantages of being simple in process, low in production cost, high in purity of target material, high in density, low in oxygen content, large in length, uniform in structure, and small in crystal grains.

Description

technical field [0001] The invention belongs to the field of deformation processing of refractory metals, and in particular relates to a method for manufacturing a molybdenum tube target, which is especially suitable for magnetron sputtering. Background technique [0002] Various types of sputtering thin film materials are widely used in semiconductor integrated circuits, optical discs, flat panel displays and general glass surface coatings. Therefore, the demand for sputtering targets, a functional material with high added value, is also increasing year by year, so it is necessary to continuously improve the performance of sputtering targets to obtain better sputtering thin film materials. [0003] For the photovoltaic industry, coated glass is inseparable from metal targets, and the usage and cost of sputtering targets account for a considerable proportion of the industry. Photovoltaic technology is divided into two categories: one is crystalline silicon (75% market share...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23P15/00
CPCC23C14/3414
Inventor 王铁军穆健刚张凤戈马志伟陈锦王江廷李强郭建威苏维丰
Owner ADVANCED TECHNOLOGY & MATERIALS CO LTD
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