A kind of preparation method of asymmetric supercapacitor
A kind of supercapacitor, asymmetric technology, applied in hybrid/electric double layer capacitor manufacturing, manufacturing microstructure devices, decorative arts, etc., can solve the problem of small capacitance of asymmetric electrochemical supercapacitors, and achieve simple and feasible carbonization process , low investment cost, wide application prospects
Active Publication Date: 2017-08-25
GMCC ELECTRONICS TECH WUXI CO LTD
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Problems solved by technology
[0005] In order to solve the problem that the capacitance of the existing asymmetric electrochemical supercapacitor is small, the present invention provides a method for preparing an asymmetric supercapacitor
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[0027] A method for preparing an asymmetric supercapacitor, comprising the steps of:
[0028] S1: Select two 2cm×2cm silicon wafers as substrates, and wash the substrates in hydrogen peroxide, sulfuric acid / hydrogen peroxide, hydrochloric acid / ammonia, and hydrogen peroxide solution to remove oil, oxide film and metal ions, and then dry them;
[0029] S2: Put the cleaned and dried silicon wafer base into an oxidation furnace for oxidation. The oxidation method is dry oxidation or wet oxygen oxidation. The oxidation time is 5 hours, and a silicon dioxide oxide film is formed on the surface of the silicon wafer base as an electrode. Insulation layer, the thickness of the insulation layer is 1.5 microns;
[0030] S3: Place one of the silicon substrates forming the insulating layer in the deposition system device, and deposit a metal titanium layer on the surface of the silicon substrate by deposition, with a thickness of 400nm;
[0031] S4: Put the titanium layer formed in S3 in...
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Abstract
The present invention relates to the technical field of micro-electromechanical systems, in particular to a method for preparing an asymmetric supercapacitor, comprising the following steps: firstly prepare two identical silicon chip substrates after cleaning and drying, and oxidize the surface of one of the silicon chip substrates to form two Oxide the silicon insulating layer, and deposit a layer of metal titanium, then anodize to form ordered TiO2 nanotubes, deposit NiO in the TiO2 nanotubes, and prepare TiO2 nanotube electrodes; evenly spin-coat SU‑8 on another silicon wafer substrate Then the SU-8 glue is photolithographically processed to form a hexahedral columnar array structure, and the array structure is carbonized to prepare a carbonized electrode. Finally, the TiO2 nanotube electrode and the carbonized electrode are separated by a PP film and filled with an electrolyte. Assembled into an asymmetric supercapacitor. The invention comprehensively utilizes the principle of Faraday's quasi-capacitance and the principle of the electric double layer, and the prepared two electrodes can form a porous structure, and the specific capacitance is greatly improved compared with the traditional supercapacitor based on the principle of the electric double layer.
Description
technical field [0001] The invention relates to the technical field of Micro Electro Mechanical System (MEMS), belongs to the technical scope of manufacturing micro-supercapacitors, and specifically relates to a method for preparing an asymmetric supercapacitor. Background technique [0002] MEMS (Micro Electromechanical System) is an industrial technology that integrates microelectronics technology and mechanical engineering. It has the advantages of low cost, small size, strong self-control and high reliability, and is the most important in recent years. One of the technological innovations. [0003] Supercapacitor is a new type of energy storage device. It is favored by the world due to its unique characteristics of large capacity, high current, fast charge and discharge, and high cycle life. As a result, many new supercapacitors have been developed and applied one after another. MEMS supercapacitors not only have the advantages of traditional supercapacitors, but also s...
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IPC IPC(8): H01G11/84H01G11/86B81C1/00
CPCY02E60/13
Inventor 李刚赵清华张文栋胡杰桑胜波马洋李朋伟菅傲群段倩倩
Owner GMCC ELECTRONICS TECH WUXI CO LTD