Energy containing metal bridged-film MEMS (Micro Electro Mechanical Systems) igniter and preparation method thereof for composite black body like energy concentrated structure

Abstract

The invention discloses an energy containing metal bridged-film MEMS (Micro Electro Mechanical Systems) igniter and a preparation method thereof for a composite black body like energy concentrated structure. The energy containing metal bridged-film MEMS igniter sequentially comprises a silicon dioxide base layer, a chamber layer, a leak-proof silicon dioxide layer, a secondary radiation layer, an insulating secondary radiation layer, a lower electrode gold layer, a cupric oxide layer, an aluminum layer, an upper electrode gold layer from bottom to top; the silicon dioxide base layer, the chamber layer, the leak-proof silicon dioxide layer and the secondary radiation layer form into the black body like energy concentrated structure; the structure of a middle chamber of the chamber layer is in a hollow cone shape to concentrate energy, reduce integral device heat capacity and enable the secondary radiation layer to suspend; the cupric oxide layer and the aluminum layer form into the energy containing metal bridged-film. According to the energy containing metal bridged-film MEMS igniter, heat dissipation of the energy containing metal bridged-film MEMS igniter is reduced and ignition output is improved due to addition of the black body like energy concentrated structure; the heat accumulation time is shortened and accordingly the ignition delay time is reduced and the ignition instant performance is improved; concentration is beneficial due to the fact that micromachining is easy to achieve.

Description

technical field [0001] The invention relates to the field of basic components of electrical explosive devices, in particular to an energy-containing metal bridge membrane MEMS igniter with a composite blackbody-like energy-gathering structure and a preparation method thereof. Background technique [0002] Electric pyrotechnics is a device that converts electrical energy into the initial energy that triggers the combustion, explosion, and work of energetic materials. It is widely used in blasting engineering, smart ammunition, small-caliber weapons, micro-nano satellite attitude control, and automotive airbags. Micro-nano manufacturing and integrated integration is an unavoidable task in the field of modern equipment manufacturing to reduce weight, miniaturize and make smart. The MEMS igniter not only has the advantages of MEMS small size, large-scale manufacturing, low cost, and high functional integration, but also can greatly reduce the amount of sensitive igniting agents ...

AI Technical Summary

Problems solved by technology

However, the thermal barrier packaging has the following disadvantages: the thermal barrier packaging material absorbs heat energy and then radiates it out, which is difficult, slow, or even not radiated out, which is not conducive to the instantaneous and efficient use of the igniter to ensure rapid ignition; thermal barrier materials are mostly ceramics and polymers. Micromachining is difficult, which will greatly increase the difficulty of microintegration; at the same time, due to poor thermal conductivity, thermal barrier materials are prone to uneven heating, and the temperature close to the semiconductor bridge surface is high while the temperature away from the surface is low. The thermal barrier material is inconsistent with the material of the semiconductor bridge layer, and there is a heat conduction interface heat capacity, and the heat shielded by the thermal barrier material is hindered from being transferred to the semiconductor bridge layer. The above shows that the thermal barrier material reduces the mechanical reliability of the igniter, so a new one is needed. Consumption reduction methods and ideas

However, so far, there have been no reports of applying this technology to energetic metal bridge membrane MEMS igniters.

Images