Method and device for supplying hydrogen-selenide mixed gas

Abstract

A calibration gas is caused to flow, at the same flow rate, through a flow control means that has been disposed in a feed gas supply channel and that controls the flow rate of hydrogen selenide gas which is a feed gas and through a flow rate measuring means for calibration. The set value of the flow rate of the hydrogen selenide gas which is caused to flow by the flow control means is corrected in accordance with the difference between the calibration-gas flow rate amounts measured respectively by the flow control means and the flow rate measuring means.

Description

technical field [0001] The invention relates to a supply method and a supply device of a hydrogen-selenide mixed gas. [0002] this application claims priority based on Japanese Patent Application No. 2012-232832 for which it applied to Japan on October 22, 2012, and uses the content here. Background technique [0003] In recent years, due to problems such as environmental pollution, global warming, and depletion of fossil fuels, solar cells have attracted attention as an energy alternative to petroleum. The current mainstream of solar cells is a compound solar cell that contains copper, indium, gallium, and selenium, and uses hydrogen selenide (H 2 Se) formed a chalcopyrite-type light-absorbing layer. It is necessary to supply the hydrogen-selenide mixed gas adjusted to a predetermined concentration to the manufacturing apparatus of this compound solar cell. [0004] However, in order to realize mass production of compound solar cells, it is necessary to supply a large a...

AI Technical Summary

Problems solved by technology

That is, there is a problem that selenium (Se) crystallization caused by the self-decomposition of hydrogen selenide is precipitated in the raw material gas supply channel L102, the on-off valves 109, 113, the raw material gas flow control unit 111, etc. where the hydrogen selenide gas flows.

In particular, there is a problem that since selenium crystals are precipitated in the source gas flow control unit 111, the flow measurement accuracy and flow control accuracy of the source gas flow control unit 111 are reduced, and as a result, the hydrogen-selenide mixed gas set in advance The difference between the concentration setting value and the actually measured value of the concentration of the hydrogen-selenide mixed gas adjusted by the supply device 201 is large (this is called an offset phenomenon)

[0010] However, in the supply method described in Patent Document 1, there is a problem that when the hydrogen selenide gas in the raw material gas supply flow path L102 is led out with an inert gas through the bypass flow path L105, for example, it is required to implement a valve in units of 0.1 seconds. Meticulous instrument operation of the action

[0011] Further, in the method of document 1, only when the hydrogen-selenide mixed gas is not supplied to the raw material gas supply flow path L102, the volume concentration of hydrogen selenide remaining in the raw material gas supply flow path L102 can be 10% or less, when When the hydrogen-selenide mixed gas is supplied, the precipitation of selenium crystals in the source gas supply channel L102 cannot be completely prevented.

Therefore, there is a problem that if the supply device 202 is operated for a long time, there will be a problem of offset phenomenon.

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