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Flexible micro pressure sensor and preparation method thereof

A micro pressure sensor, flexible technology, applied in the direction of instruments, microstructure technology, electric solid devices, etc., can solve the problems of reducing sensor sensitivity, limiting the wide application of sensors, limited deformation, etc., achieving low cost, good flexibility and good stability Effect

Inactive Publication Date: 2015-07-29
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the micro-pressure sensor based on carbon nanotubes usually adopts a cylindrical microstructure, which has limited deformation under pressure, which reduces the sensitivity of the sensor and limits the wide application of the sensor.

Method used

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  • Flexible micro pressure sensor and preparation method thereof
  • Flexible micro pressure sensor and preparation method thereof
  • Flexible micro pressure sensor and preparation method thereof

Examples

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preparation example Construction

[0031] A method for preparing a flexible micro pressure sensor includes the following steps:

[0032] Step 1: Firstly obtain a square array by photolithography, then use BOE solution and KOH solution to etch a silicon template with a regular quadrangular pyramid microstructure, and treat the silicon template on trimethylchlorosilane for 4h; the KOH solution is KOH , Isopropanol and water mixture, where H 2 The mass ratio of O, KOH and isopropanol is 2:1:2, and the solution needs to be stirred magnetically when etching in the KOH solution;

[0033] Step 2: Mix the polydimethylsiloxane and curing agent uniformly at a mass ratio of 10:1, and put them in a vacuum chamber for vacuum treatment to remove air bubbles;

[0034] Step 3: Drop the mixed droplets of polydimethylsiloxane and curing agent processed in step 2 on the silicon template with regular quadrangular pyramid microstructure obtained in step 1, and put it in a vacuum chamber to vacuum; take it out and heat it to make PDMS cur...

Embodiment

[0038] The present invention also provides a method for preparing a flexible and transparent micro pressure sensor based on carbon nanotubes, which includes the following steps:

[0039] Step 1: Use a silicon wafer with a thickness of 500μm and a layer of silicon dioxide of 300nm on the surface as a substrate to clean the silicon wafer; obtain an array of squares with a side length of 10μm on the silicon dioxide surface by photolithography, adjacent to the square The center distance is 20μm (square silica bare drain); BOE solution (mole ratio NH 4 F: HF=6:1) Etch the above-mentioned substrate at room temperature for 5 minutes to remove the exposed silicon dioxide layer, then put the substrate in acetone to remove the photoresist; put the substrate in KOH solution (quality Than H 2 O: KOH: Isopropanol = 2:1: 2), heat the water bath to 75°C, and etch for 15 min under stirring conditions to obtain a silicon template with a regular quadrangular pyramid microstructure; place the prepar...

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Abstract

The invention provides a flexible micro pressure sensor and a preparation method thereof, and belongs to the field of micro pressure sensor preparation. The flexible micro pressure sensor comprises a flexible substrate, a conducting layer and a flexible coupling electrode, wherein the flexible substrate is of a right square pyramid micro structure, the conducting layer is positioned on the flexible substrate, the flexible substrate is polydimethylsiloxane dimethyl silicone polymer with the right square pyramid micro structure, the conducting layer is a single-wall carbon nanometer tube, and the flexible coupling electrode is polyethylene glycol terephthalate with an indium tin oxide conducting layer. A lower electrode with the right square pyramid micro structure is adopted, and the deformation of the right square pyramid micro structure is very obvious under the pressure effect, so that the response of the sensor to micro pressure is more sensitive; the single-wall carbon nanometer tube is adopted as the conducting layer, and is transparent for visible light, in addition, the sensor cannot be easily damaged in the stretching or bending process, and the stability is good; the polydimethylsiloxane dimethyl silicone polymer is used as a lower electrode substrate, the flexibility is good, and the bending and the stretching can be realized.

Description

Technical field [0001] The invention belongs to the field of micro pressure sensor preparation, and specifically relates to a flexible micro pressure sensor and a preparation method thereof. Background technique [0002] Micro pressure sensor is a new type of pressure sensor manufactured by using semiconductor materials and micro processing technology. Compared with traditional pressure sensors, micro pressure sensors have the advantages of high accuracy, high agility, good dynamic characteristics, small size, corrosion resistance, and low cost. They have been widely used in heart rate monitoring, smart switches, and artificial electronic skin. With the widespread application of more and more wearable or rollable devices, and the urgent need for the development of artificial flexible and extended electronic skins, the research on flexible sensors has attracted more and more attention from researchers. [0003] Carbon nanotube is a one-dimensional quantum material with a special st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/00B81C1/00
Inventor 林媛黄振龙高敏颜卓程潘泰松
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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