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Preparation method of spongy graphene-based stretchable gas sensor

A gas-sensing sensor, graphene-based technology, applied in the field of sensors, can solve the problems of complex preparation process of stretchable graphene-based active materials, large contact resistance between individual graphene and external wires, affecting the sensitivity and performance of gas-sensing sensors, etc. , to achieve the effect of simple and controllable method, good conductivity and high sensitivity

Inactive Publication Date: 2015-07-29
SHANDONG NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Stretchable sensitive materials are the key to the preparation of stretchable sensors, but there are still two problems that need to be solved in related research: 1. The preparation process of stretchable graphene-based active materials is complicated and the preparation cost is also high
Most of the preparation methods require multi-step processing under conditions such as higher temperature and higher vacuum, which require a long preparation time, and many of them also need to use complicated wet or dry transfer processes; 2. Separate graphene and external The contact resistance of the wire is too large, which affects the sensitivity and performance of the gas sensor
In order to better export its current, we use nickel foam to increase its conductivity. However, nickel foam cannot be stretched and cannot be directly applied to gas sensors

Method used

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  • Preparation method of spongy graphene-based stretchable gas sensor
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  • Preparation method of spongy graphene-based stretchable gas sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Graphene is grown on the nickel foam substrate and finally a graphene / nickel particle hybrid structure gas sensor is grown, such as figure 1 shown, including the following preparation steps

[0042] 1. Take nickel foam with a size of 6cm×8cm and place it in a tube furnace;

[0043] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;

[0044] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;

[0045] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;

[0046]5. After the tube furnace temperature rises to 300 degrees Celsius, anneal at a constant temperature for 20 minutes;

[0047] 6. After the tube furnace temperature rises to 1000 degrees Celsius, inject met...

Embodiment 2

[0068] Graphene is grown on the nickel foam substrate and finally the graphene / nickel particle hybrid structure is grown, including the following preparation steps

[0069] 1. Take nickel foam with a size of 7cm×7cm and place it in a tube furnace;

[0070] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;

[0071] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;

[0072] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;

[0073] 5. After the tube furnace temperature rises to 300 degrees Celsius, anneal at a constant temperature for 20 minutes;

[0074] 6. After the tube furnace temperature rises to 1000 degrees Celsius, inject methane into the vacuum chamber, set...

Embodiment 3

[0097] Graphene is grown on the nickel foam substrate and finally a graphene / nickel particle hybrid structure gas sensor is grown, such as figure 1 shown, including the following preparation steps

[0098] 1. Take nickel foam with a size of 5cm×9cm and place it in a tube furnace;

[0099] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;

[0100] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;

[0101] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;

[0102] 5. After the tube furnace temperature rises to 300 degrees Celsius, anneal at a constant temperature for 20 minutes;

[0103] 6. After the tube furnace temperature rises to 1000 degrees Celsius, inject me...

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Abstract

The invention relates to a preparation method of a spongy graphene-based stretchable gas sensor. Firstly, a spongy graphene material is prepared on nickel foam with a chemical vapor deposition method, the prepared graphene / nickel foam is immersed in an etching solution and slowly reacts, accordingly, most of nickel metal is replaced chemically, the nickel metal is turned into small nickel particles, a spongy graphene / nickel particle mixing structure is fished out of the etching solution with a seal type fishing method and then is cleaned and dried, a prestretching elastic substrate is slowly recovered to the original length or area, electrodes are prepared at two ends of the graphene / nickel particle mixing structure, and the stretchable gas sensor is obtained. The gas sensor has high conductivity and good gas sensitive characteristic, is low in cost and controllable and can realize large-area growth.

Description

technical field [0001] The invention relates to a preparation method of a stretchable gas sensor, in particular to a preparation method of a stretchable gas sensor with a sponge-like graphene / nickel particle mixed nanostructure, belonging to the technical field of sensors. Background technique [0002] As a new type of electronic equipment today, stretchable electronic devices can still exhibit good electrical properties under the condition of large mechanical stress, and have a wide range of applications in human implants, intelligent flexible devices, wearable devices, wireless sensing devices, etc. the use of. Among them, the preparation of stretchable sensitive materials is the key. Three-dimensional sponge-like graphene has the excellent gas-sensing properties of two-dimensional graphene, and at the same time has a larger specific surface area and better flexibility. The general degree of distortion will not affect the properties and characteristics of the material, wh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12B82Y30/00B82Y40/00C01B31/04
Inventor 杨诚毕懿卿路婧徐媛媛满宝元姜守振修显武刘爱华
Owner SHANDONG NORMAL UNIV
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