High light transmittance flexible polyimide substrate ito conductive film and its preparation method and application
A technology of polyimide film and polyimide, which is applied in the direction of cable/conductor manufacturing, conductive layer on insulating carrier, circuit, etc., can solve the problems of process parameter specification and low heat resistance, and achieve excellent optical performance , excellent electrical conductivity, and the effect of improving crystal quality
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Embodiment 1
[0028] Put the fluorine-containing semi-aromatic PI film (the average light transmittance in the visible light region is 95.7%, and the glass transition temperature is 280 ° C) on the sample stage of the sputtering chamber of the radio frequency magnetron sputtering device, and pump the sputtering chamber Vacuum; after the sample stage is heated to 180°C, turn on the RF power supply, adjust the sputtering power to 50W, and feed high-purity argon to the first working pressure of 0.3Pa, then deposit the first ITO conductive layer on the PI film substrate to 40nm Then, according to the set oxygen-argon ratio of 1%, feed high-purity argon and oxygen to the second working pressure of 0.3Pa, and deposit the second ITO conductive layer on the first ITO conductive layer with a thickness of 140nm; turn off the radio frequency power supply and stop Sputtering, keep the vacuum environment to cool down and take out the conductive film; under vacuum atmosphere, the prepared conductive film ...
Embodiment 2
[0030] Put the fluorine-containing semi-aromatic PI film (the average light transmittance in the visible region is 96.4%, and the glass transition temperature is 323 °C) on the sample stage of the sputtering chamber of the radio frequency magnetron sputtering device, and pump the sputtering chamber Vacuum; after raising the temperature of the sample stage to 220°C, turn on the RF power supply, adjust the sputtering power to 70W, inject high-purity argon gas to the first working pressure of 0.4Pa, and deposit the first ITO conductive layer on the PI film substrate to 40nm Then, according to the set oxygen-argon ratio of 2%, feed high-purity argon and oxygen to the second working pressure of 0.8Pa, and deposit the second ITO conductive layer on the first ITO conductive layer with a thickness of 140nm; turn off the radio frequency power supply and stop Sputtering, keep the vacuum environment to cool down and take out the conductive film; in the vacuum atmosphere, the prepared cond...
Embodiment 3
[0032] Put the fluorine-containing semi-aromatic PI film (the average light transmittance in the visible light region is 98.2%, and the glass transition temperature is 337 ° C) on the sample stage of the sputtering chamber of the radio frequency magnetron sputtering device, and pump the sputtering chamber Vacuum; after raising the temperature of the sample stage to 220°C, turn on the RF power supply, adjust the sputtering power to 90W, pass high-purity argon gas to the first working pressure of 0.3Pa, and deposit the first ITO conductive layer on the PI film substrate to 40nm Then, according to the set oxygen-argon ratio of 4%, pass high-purity argon and oxygen to the second working pressure of 0.5Pa, and deposit the second ITO conductive layer on the first ITO conductive layer with a thickness of 160nm; turn off the radio frequency power supply and stop Sputtering, keeping the vacuum environment to lower the temperature and then taking out the conductive film; the prepared con...
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