Continuous casting technology of belt material aluminum pipe and aluminum alloy rotating target materials

Abstract

The invention discloses a continuous casting technology of a belt material aluminum pipe and aluminum alloy rotating target materials. The method comprises the steps of screened pipe preparing, aluminum or aluminum alloy melting and metal liquid casting and molding. By means of the technology, the micro-structure of the surface of the screened pipe is improved, the binding force between the metal aluminum and a steel pipe is increased, it is guaranteed that the metal aluminum in the liquid phase is combined with the steel pipe completely and firmly in the solidification process, and in the subsequent using process, it is guaranteed that the metal aluminum in the liquid phase is not separated from the steel pipe; all the elements are mixed uniformly, by controlling the atmosphere of a casting furnace body, the pouring speed and the cooling speed, it is guaranteed that the great micro-structure is obtained by the target materials, the combination degree between the target materials and the steel pipe is guaranteed, and air pores are prevented from occurring. The utilization rate of the target materials is improved, and the service lives of the target materials are prolonged; the production cost is reduced, the compactness of the target materials is high, gains are uniform in size and distribution, and the technology is applicable to the manufacturing of connecting membranes of flat display panels.

Description

technical field [0001] The invention relates to the processing of B23P metal or C22C alloy or B22D metal casting technology applied in the IPC classification of flat panel displays, especially the continuous casting technology of aluminum and aluminum alloy rotating targets with liner. Background technique [0002] In the prior art, the market has higher and higher requirements for flat-panel displays represented by liquid crystal (LCD) and organic light-emitting diode (OLED). From high-definition to ultra-high-definition, even panel manufacturers have begun to lay out the 4K market. However, as the thin film transistor (TFT) gradually becomes smaller and the size of the glass substrate used to prepare the panel is getting larger, it is very important to be able to form a uniform metal wiring film layer and continuously reduce the cost of materials. Among them, the metal aluminum target is An important part of the wiring material. [0003] In order to meet market demand, t...

AI Technical Summary

Problems solved by technology

The advantage of using casting + binding to prepare metal aluminum and aluminum alloy targets is that the target can be combined with the liner through the binding process, and the heat generated on the surface of the target is transferred to the target through the bonding layer, usually metal indium. The cooling water in the liner, so that there is no need to worry about the risk of breaking down the aluminum target and the deformation of the liner causing the cooling water to leak and damage the equipment; but the disadvantage of this process is that it increases the binding cost and due to the limitations of the binding process leads to High-power continuous sputtering cannot be used, which affects the production cycle to a certain extent, resulting in a decrease in production capacity

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